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Magnetron sputtering method and sputtering target

2000
ICHIHARA KATSUTARO   +3 more
openaire   +1 more source

Magnetron sputtering apparatus

Metal Finishing, 1995
openaire   +1 more source

Magnetron sputtering apparatus

1985
RAMACHANDRAN KOVILVILA, GIANI ENRICO
openaire   +1 more source

Magnetron sputtering systems

Microelectronics Reliability, 1983
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Magnetron sputtering apparatus

Metal Finishing, 1998
openaire   +1 more source

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