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Application of the magnetron sputtering for nanostructured electrocatalysts synthesis
International Journal of Hydrogen Energy, 2016V N Fateev
exaly
Tailoring of TiO2 film microstructure by pulsed-DC and RF magnetron co-sputtering
Surface and Coatings Technology, 2019Marius Urbonavicius +2 more
exaly
METHOD AND DEVICE FOR MAGNETRON SPUTTERING
2005SZYSZKA BERND, PFLUG ANDREAS
openaire +3 more sources
Method and apparatus for magnetron sputtering
2002TZATZOV KONSTANTIN K +1 more
openaire +2 more sources

