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Materials and structure engineering by magnetron sputtering for advanced lithium batteries
Energy Storage Materials, 2021Ji Qian, , Renjie Chen
exaly
Introduction to magnetron sputtering
2020Jon Tomas Gudmundsson, Daniel Lundin
openaire +1 more source
Review on Hydrophobic Thin Films Prepared Using Magnetron Sputtering Deposition
Materials, 2023Weijie Song, Xiaopeng Qi, Ling Ai
exaly
METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING
2022ROHRMANN HARTMUT +2 more
openaire +3 more sources
Magnetron sputtering: a review of recent developments and applications
Vacuum, 2000P J Kelly, R D Arnell
exaly
Recent advances in magnetron sputtering
Surface and Coatings Technology, 1999P J Kelly, R D Arnell
exaly