Results 311 to 320 of about 3,143,235 (349)
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The International Journal of Advanced Manufacturing Technology, 2022
Nina Wang +4 more
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Nina Wang +4 more
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The International Journal of Advanced Manufacturing Technology, 2021
Yun Zhang, Xiaojie Xu
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Yun Zhang, Xiaojie Xu
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Pad effects on material-removal rate in chemical-mechanical planarization
Journal of Electronic Materials, 2002The role of a porous pad in controlling material-removal rate (MRR) during the chemical-mechanical planarization (CMP) process has been studied numerically. The numerical results are used to develop a phenomenological model that correlates the forces on each individual abrasive particle to the applied nominal pressure.
Ashraf Bastawros +3 more
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A Wafer-Scale Material Removal Rate Model for Chemical Mechanical Planarization
, 2019In this work, a new wafer-scale material removal rate (MRR) model is proposed to investigate the underlying removal mechanism of wafer surface in the chemical mechanical planarization (CMP) process.
Qinzhi Xu, Lan Chen, Jianyun Liu, H. Cao
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Thermal Analysis For Material Removal Rate In Micro EDM Process
Materials Today: Proceedings, 2018Abstract In today’s modern world of technology, design and manufacturing at micro level require more accurate and defect free machining devices. Electrical Discharge Machining (EDM) has been developed as an alternative solution for micro machining of materials with high accuracy and precision which has high application in aerospace, automobile and ...
Albin P. Abraham, Lijo Paul
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The International Journal of Advanced Manufacturing Technology, 2021
Nina Wang +4 more
semanticscholar +1 more source
Nina Wang +4 more
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Rate of Material Removal When Processing Titanium-Doped Sapphire
Journal of Superhard Materials, 2023O. O. Vovk +5 more
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Material Removal Rate Optimization Under ANN and QRCCD
2023Imhade P. Okokpujie, Lagouge K. Tartibu
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Experimental Study of Material Removal Rate (MRR) in Electrochemical Drilling of Composite Material
2022 2nd International Conference on Advances in Engineering Science and Technology (AEST), 2022Ali Khalid Salman, Abbas F. Ibrahim
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