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Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application
Sensors, 2018Qiang Shen, Han Zhang
exaly
Driving circuit, method for driving a MEMS gyroscope and a corresponding MEMS gyroscope
2021openaire +2 more sources
Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
Sensors, 2016Hongsheng Li, Jun Tang, Huiliang Cao
exaly
Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance
Sensors, 2018Yang Gao, Xukai Ding, Hongsheng Li
exaly

