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On the control of vibratory MEMS gyroscopes
Smart Structures and Systems, 2010This paper addresses the control issue of vibratory MEMS-based gyroscopes. This study considers a gyroscope that can be modeled by an inner mass attached to an outer mass by four springs and four dampers. The outer mass itself is attached to the rotating frame by an equal number of springs and dampers.
S. Choura, N. Aouni, S. El-Borgi
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The Physics of Resonant MEMS Gyroscopes
2019High-performance MEMS gyroscopes can be used for inertial navigation in GPS-denied environments, as well as for scientific applications such as low-cost geophysical measurements and relativity experiments. This chapter presents the theories of resonant MEMS gyroscope and focuses on understanding the physical phenomena in resonant MEMS gyroscopes to ...
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Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice
Micromachines, 2022Kevin W Li +2 more
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Dynamical analysis of an improved MEMS ring gyroscope encircled by piezoelectric film
International Journal of Mechanical Sciences, 2020Ying-Jing Qian
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A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging
Sensors, 2021Fuhua Yang, Pengfei Xu, Guowei Han
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System for MEMS Gyroscope Testing
2016This paper presents fundamental information about an apparatus for tests on MEMS gyroscopes. Within the introductory section, the measurement system used to test MEMS gyroscopes at a Honeywell laboratory is characterized; the set-up comprises a Polytec MSA-500 analyzer, goniometers, and a controller.
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An Integrated MEMS Gyroscope Array with Higher Accuracy Output
Sensors, 2008, Honglong Chang, Yuan Weizheng
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