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Modeling and measurements of MEMS gyroscopes
PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No.04CH37556), 2004Advances in MEMS inertial sensors, such as gyroscopes, require the use of computational modeling and simulation with physical measurements. We believe that successful combination of computer aided design (CAD) and multiphysics simulation tools with the state-of-the-art (SOTA) measurement methodology will contribute to reduction of high prototyping ...
R.J. Pryputniewicz +2 more
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2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC), 2016
This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud +3 more
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This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud +3 more
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A Parametrically Amplified MEMS Gyroscope
Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT), 2010The applicability of parametric amplification of either the primary and secondary vibration modes of a MEMS gyroscope, shown in Fig.1 is investigated experimentally in this paper. All control schemes have been implemented digitally onto a SHARC DSP development board.
Barry J. Gallacher +3 more
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3-DOF MEMS Gyroscope modeling and design
Proceedings of 2011 International Conference on Electronic & Mechanical Engineering and Information Technology, 2011In this paper, issues related to the modeling and designs on a 3-DOF (degree-of-freedom) MEMS Gyroscope are studied. The MEMS Gyroscope employs a combination of two proof-masses and flexures to form 1-DOF resonator in the drive direction and 2-DOF oscillator in the sense direction.
Xuguo Huang, Ping Sun, Zhi Wang
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A TIA-based interface for MEMS capacitive gyroscope
2011 9th IEEE International Conference on ASIC, 2011This paper presents a CMOS readout and driving interface for micro-electro-mechanical systems (MEMS) capacitive gyroscope. A low-noise fully differential trans-impedance amplifier (TIA) scheme is used both in readout channel and driving loop for capacitive signal detection.
Tao Yin +4 more
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MEMS TECHNOLOGIES FOR NOVEL GYROSCOPES
2023Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available,
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Active disturbance rejection control of a MEMS gyroscope
2008 American Control Conference, 2008A novel method is proposed for controlling the position of a vibrating proof mass in a z-axis MEMS gyroscope while simultaneously approximating its rotation rate in a third dimension independent of cross coupling terms. Designing the controller to require minimal model information and reject a broad range of disturbances, including the cross coupling ...
Brian Fast +2 more
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Fuzzy merging of MEMS accelerometers and gyroscopes measurements
2016 International Symposium on INnovations in Intelligent SysTems and Applications (INISTA), 2016The work presents the design of a fuzzy rule base aimed at intelligent merging of measurements by the two sensor types in a Micro Electro-Mechanical Sensor (MEMS) device — accelerometers and three gyroscopes placed on the three axes in the 3D space. The idea aroused from the available expert knowledge how to merge the measurements from both sensors in ...
Petia D. Koprinkova-Hristova +1 more
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System for MEMS Gyroscope Testing
2016This paper presents fundamental information about an apparatus for tests on MEMS gyroscopes. Within the introductory section, the measurement system used to test MEMS gyroscopes at a Honeywell laboratory is characterized; the set-up comprises a Polytec MSA-500 analyzer, goniometers, and a controller.
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The Physics of Resonant MEMS Gyroscopes
2019High-performance MEMS gyroscopes can be used for inertial navigation in GPS-denied environments, as well as for scientific applications such as low-cost geophysical measurements and relativity experiments. This chapter presents the theories of resonant MEMS gyroscope and focuses on understanding the physical phenomena in resonant MEMS gyroscopes to ...
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