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High reliable MEMS gyroscopes

open access: yesProceedings of JSPE Semestrial Meeting, 2009
Degawa, Munenori   +4 more
openaire   +1 more source

MEMS electrochemical angular accelerometer: a paradigm shift for attitude detection and control in rotorcraft UAVs. [PDF]

open access: yesMicrosyst Nanoeng
Zhu M   +12 more
europepmc   +1 more source
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Microprocessing of MEMS gyroscopes

2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus), 2018
Application of laser radiation for materials microprocessing is widely used in various fields of science and technology today. The paper discusses the possibility of balancing the elements of MEMS gyroscope by using exposure for laser radiation. As a result of studying the parameters of the laser modification of silicon.
Lyudmila I. Dolgovykh   +1 more
openaire   +1 more source

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