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2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC), 2016
This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud +3 more
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This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud +3 more
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A Parametrically Amplified MEMS Gyroscope
Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT), 2010The applicability of parametric amplification of either the primary and secondary vibration modes of a MEMS gyroscope, shown in Fig.1 is investigated experimentally in this paper. All control schemes have been implemented digitally onto a SHARC DSP development board.
Barry J. Gallacher +3 more
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Proceedings of IEEE Sensors, 2003
The gyroscope reported in this paper is a lateral-axis angular rate sensor with in-plane vibration and out-of-plane Coriolis acceleration sensing. The sensor plus on-chip CMOS circuitry is about 1 mm by 1 mm in size and is fabricated by a post-CMOS micromachining process that uses interconnect metal layers as etching mask(s) and a single-crystal ...
null Huikai Xie, G.K. Fedder
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The gyroscope reported in this paper is a lateral-axis angular rate sensor with in-plane vibration and out-of-plane Coriolis acceleration sensing. The sensor plus on-chip CMOS circuitry is about 1 mm by 1 mm in size and is fabricated by a post-CMOS micromachining process that uses interconnect metal layers as etching mask(s) and a single-crystal ...
null Huikai Xie, G.K. Fedder
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Bias Prediction for MEMS Gyroscopes
IEEE Sensors Journal, 2012MEMS gyroscopes are gaining popularity because of their low manufacturing costs in large quantities. For navigation system engineering, this presents a challenge because of strong nonstationary noise processes, such as 1/f noise, in the output of MEMS gyros.
Takala Jarmo +2 more
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Modeling and measurements of MEMS gyroscopes
PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No.04CH37556), 2004Advances in MEMS inertial sensors, such as gyroscopes, require the use of computational modeling and simulation with physical measurements. We believe that successful combination of computer aided design (CAD) and multiphysics simulation tools with the state-of-the-art (SOTA) measurement methodology will contribute to reduction of high prototyping ...
R.J. Pryputniewicz +2 more
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MEMS TECHNOLOGIES FOR NOVEL GYROSCOPES
2023Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available,
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The Analysis of the Subharmonic Excitation in a Disk MEMS Gyroscope
2020 IEEE Sensors, 2020In order to evaluate the impact of high frequency excitation signals, especially frequency-doubled signals, on the gyroscope’s performance, an analysis of the subharmonic excitation in a disk MEMS gyroscope is presented in this paper. Due to the existence of the quadratic nonlinearity, when subharmonic (double frequency) excitation signals are applied ...
Kuo Lu +8 more
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On the control of vibratory MEMS gyroscopes
Smart Structures and Systems, 2010This paper addresses the control issue of vibratory MEMS-based gyroscopes. This study considers a gyroscope that can be modeled by an inner mass attached to an outer mass by four springs and four dampers. The outer mass itself is attached to the rotating frame by an equal number of springs and dampers.
S. Choura, N. Aouni, S. El-Borgi
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3-DOF MEMS Gyroscope modeling and design
Proceedings of 2011 International Conference on Electronic & Mechanical Engineering and Information Technology, 2011In this paper, issues related to the modeling and designs on a 3-DOF (degree-of-freedom) MEMS Gyroscope are studied. The MEMS Gyroscope employs a combination of two proof-masses and flexures to form 1-DOF resonator in the drive direction and 2-DOF oscillator in the sense direction.
Xuguo Huang, Ping Sun, Zhi Wang
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Fuzzy merging of MEMS accelerometers and gyroscopes measurements
2016 International Symposium on INnovations in Intelligent SysTems and Applications (INISTA), 2016The work presents the design of a fuzzy rule base aimed at intelligent merging of measurements by the two sensor types in a Micro Electro-Mechanical Sensor (MEMS) device — accelerometers and three gyroscopes placed on the three axes in the 3D space. The idea aroused from the available expert knowledge how to merge the measurements from both sensors in ...
Petia D. Koprinkova-Hristova +1 more
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