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MEMS TECHNOLOGIES FOR NOVEL GYROSCOPES
, 2023 Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available,
Ozan Erturk (17593458)
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Some of the next articles are maybe not open access.
Proceedings of IEEE Sensors, 2003
The gyroscope reported in this paper is a lateral-axis angular rate sensor with in-plane vibration and out-of-plane Coriolis acceleration sensing. The sensor plus on-chip CMOS circuitry is about 1 mm by 1 mm in size and is fabricated by a post-CMOS micromachining process that uses interconnect metal layers as etching mask(s) and a single-crystal ...
null Huikai Xie, G.K. Fedder
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The gyroscope reported in this paper is a lateral-axis angular rate sensor with in-plane vibration and out-of-plane Coriolis acceleration sensing. The sensor plus on-chip CMOS circuitry is about 1 mm by 1 mm in size and is fabricated by a post-CMOS micromachining process that uses interconnect metal layers as etching mask(s) and a single-crystal ...
null Huikai Xie, G.K. Fedder
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Modeling and measurements of MEMS gyroscopes
PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No.04CH37556), 2004Advances in MEMS inertial sensors, such as gyroscopes, require the use of computational modeling and simulation with physical measurements. We believe that successful combination of computer aided design (CAD) and multiphysics simulation tools with the state-of-the-art (SOTA) measurement methodology will contribute to reduction of high prototyping ...
R.J. Pryputniewicz +2 more
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The Analysis of the Subharmonic Excitation in a Disk MEMS Gyroscope
2020 IEEE Sensors, 2020In order to evaluate the impact of high frequency excitation signals, especially frequency-doubled signals, on the gyroscope’s performance, an analysis of the subharmonic excitation in a disk MEMS gyroscope is presented in this paper. Due to the existence of the quadratic nonlinearity, when subharmonic (double frequency) excitation signals are applied ...
Kuo Lu +8 more
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On the control of vibratory MEMS gyroscopes
Smart Structures and Systems, 2010This paper addresses the control issue of vibratory MEMS-based gyroscopes. This study considers a gyroscope that can be modeled by an inner mass attached to an outer mass by four springs and four dampers. The outer mass itself is attached to the rotating frame by an equal number of springs and dampers.
S. Choura, N. Aouni, S. El-Borgi
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3-DOF MEMS Gyroscope modeling and design
Proceedings of 2011 International Conference on Electronic & Mechanical Engineering and Information Technology, 2011In this paper, issues related to the modeling and designs on a 3-DOF (degree-of-freedom) MEMS Gyroscope are studied. The MEMS Gyroscope employs a combination of two proof-masses and flexures to form 1-DOF resonator in the drive direction and 2-DOF oscillator in the sense direction.
Xuguo Huang, Ping Sun, Zhi Wang
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Fuzzy merging of MEMS accelerometers and gyroscopes measurements
2016 International Symposium on INnovations in Intelligent SysTems and Applications (INISTA), 2016The work presents the design of a fuzzy rule base aimed at intelligent merging of measurements by the two sensor types in a Micro Electro-Mechanical Sensor (MEMS) device — accelerometers and three gyroscopes placed on the three axes in the 3D space. The idea aroused from the available expert knowledge how to merge the measurements from both sensors in ...
Petia D. Koprinkova-Hristova +1 more
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A Novel Oscillation Controller for Vibrational MEMS Gyroscopes
2007 American Control Conference, 2007This paper introduces a novel oscillation controller for the drive axis of a MEMS gyroscope. Assuming the resonant frequencies of the drive and sense axes are matched and no external control input for sense axis, we employ the controller to drive the drive axis to resonance, to regulate the output amplitude of drive axis to a desired value, and to ...
Lili Dong, Qing Zheng, Zhiqiang Gao
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The Physics of Resonant MEMS Gyroscopes
2019High-performance MEMS gyroscopes can be used for inertial navigation in GPS-denied environments, as well as for scientific applications such as low-cost geophysical measurements and relativity experiments. This chapter presents the theories of resonant MEMS gyroscope and focuses on understanding the physical phenomena in resonant MEMS gyroscopes to ...
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System for MEMS Gyroscope Testing
2016This paper presents fundamental information about an apparatus for tests on MEMS gyroscopes. Within the introductory section, the measurement system used to test MEMS gyroscopes at a Honeywell laboratory is characterized; the set-up comprises a Polytec MSA-500 analyzer, goniometers, and a controller.
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