The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes [PDF]
Micromachines, 2020 With the miniaturization of micro-electro-mechanical system (MEMS) gyroscopes, it is necessary to study their nonlinearity. The phase-frequency characteristics, which affect the start-up time, are crucial for guaranteeing the gyroscopes’ ...
Yan Su, Pengfei Xu, Chaowei Si
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Research on Packaging Reliability and Quality Factor Degradation Model for Wafer-Level Vacuum Sealing MEMS Gyroscopes [PDF]
Micromachines, 2023 MEMS gyroscopes are widely applied in consumer electronics, aerospace, missile guidance, and other fields. Reliable packaging is the foundation for ensuring the survivability and performance of the sensor in harsh environments, but gas leakage models of ...
Yingyu Xu +6 more
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Composite Compensation Method for Scale-Factor Nonlinearity in MEMS Gyroscopes Based on Initial Calibration [PDF]
MicromachinesWith the advancement of error correction techniques such as quadrature suppression and mode matching, the bias stability and overall accuracy of MEMS gyroscopes have been greatly improved. However, scale-factor nonlinearity often being underestimated has
Zhaoyin Ding, Yi Zhou
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MEMS and MOEMS Gyroscopes: A Review
Photonic Sensors, 2023 Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS ...
Wenyi Huang +9 more
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Applied Sciences (Switzerland)MEMS (micro-electro-mechanical system) gyroscopes and accelerometers are used in several applications. They are very popular due to their small size, low price, and accessibility.
Pawel Rzucidlo +2 more
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Thermoelastic damping in MEMS gyroscopes at high frequencies. [PDF]
Microsyst Nanoeng, 2023 AbstractMicroelectromechanical systems (MEMS) gyroscopes are widely used, e.g., in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such
Schiwietz D +2 more
europepmc +5 more sources
The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes [PDF]
Micromachines, 2022 In this paper, we develop a new approach in order to understand the origin of the quadrature error in MEMS gyroscopes. As the width of the flexure springs is a critical parameter in the MEMS design, it is necessary to investigate the impact of the width ...
Alexandre Azier +3 more
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Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes
Designs, 2023 Microelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior.
Waqas Amin Gill +3 more
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A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments
Sensors, 2022 Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of attention over the last two decades because of their low power consumption, easy integration, and low fabrication cost.
Waqas Amin Gill +3 more
doaj +2 more sources
Research on a Feedthrough Suppression Scheme for MEMS Gyroscopes Based on Mixed-Frequency Excitation Signals [PDF]
MicromachinesFeedthrough interference is inevitably introduced in MEMS gyroscopes due to non-ideal factors such as circuit layout design and fabrication processes, exerting non-negligible impacts on gyroscope performance. This study proposes a feedthrough suppression
Xuhui Chen +6 more
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