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Neural Adaptive Control for MEMS Gyroscope With Full-State Constraints and Quantized Input

IEEE Transactions on Industrial Informatics, 2020
In this article, we investigate the neural adaptive quantized control problem for microelectromechanical system (MEMS) gyroscope with full-state constraints and lumped disturbances.
Xingling Shao, Yi Shi
semanticscholar   +1 more source

Design, Fabrication, and Experiment of a Decoupled Multi-Frame Vibration MEMS Gyroscope

IEEE Sensors Journal, 2021
A z-axis decoupled multi-frame vibration MEMS gyroscope (DMFVMG) is presented in this paper. Firstly, the decoupled principle is employed and the sense frame, Coriolis frame and drive frame are arranged through inner fame, intermediate frame and outer ...
Huiliang Cao   +5 more
semanticscholar   +1 more source

Microprocessing of MEMS gyroscopes

2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus), 2018
Application of laser radiation for materials microprocessing is widely used in various fields of science and technology today. The paper discusses the possibility of balancing the elements of MEMS gyroscope by using exposure for laser radiation. As a result of studying the parameters of the laser modification of silicon.
Lyudmila I. Dolgovykh   +1 more
openaire   +1 more source

Sensitivity Voltage Analysis for Piezoelectric MEMS Gyroscope using Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)

International Conference on Computing: Theory and Applications, 2022
MEMS Gyroscopes are used in many life applications such as drones, automobiles, and robotics. It measures the angular rate with Coriolis force. The signal for the rotation rate of the MEMS gyroscope can be produced by measuring the lateral motion ...
Sherif A. Ghamry   +3 more
semanticscholar   +1 more source

A Digital Control Structure for Lissajous Frequency-Modulated Mode MEMS Gyroscope

IEEE Sensors Journal, 2022
This article proposes a digital control structure for a doubly decoupled gyroscope working in the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops (PLLs), which demodulates the angular rate signal directly from the readable ...
Xuetong Wang   +6 more
semanticscholar   +1 more source

Research on improving the north-seeking precision of MEMS gyroscope

Measurement science and technology, 2022
In order to improve the north-seeking precision of the micro-electro-mechanical system (MEMS) gyroscope, it is necessary to measure the earth’s rotation angular velocity accurately.
Dongning Guo   +3 more
semanticscholar   +1 more source

Improving the Temperature Stability of MEMS Gyroscope Bias with on-chip Stress Sensors

2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Temperature calibration is commonly used to suppress the bias drift of MEMS inertial sensors. Temperature compensation reduces the bias drift but cannot eliminate it.
Derin Erkan, E. Tatar
semanticscholar   +1 more source

North finding with a single double mass MEMS gyroscope- A performance demonstrator

International Symposium on Switching, 2021
North-finders based on angular rate sensors have an advantage over magnetic compasses or GPS (global positioning system) as they are insensitive against local Earth magnetic field variations and independent of electromagnetic transmission.
D. Bülz   +10 more
semanticscholar   +1 more source

MEMS Gyroscope FEM Modeling and Simulation

2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES), 2018
This paper the analysis of a 3D model of MEMS Gyroscope is presented. The FEM analysis of the 3D structure has been performed in very popular COMSOL Multiphysics software. Authors took particular attention on mechanical behaviour particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense ...
Jacek Nazdrowicz   +3 more
openaire   +1 more source

Fuzzy wavelet neural control with improved prescribed performance for MEMS gyroscope subject to input quantization

Fuzzy Sets Syst., 2020
In this paper, a fuzzy wavelet neural control scheme with improved prescribed performance is investigated for micro-electro-mechanical system (MEMS) gyroscope in the presence of uncertainties and input quantization.
Xingling Shao, Haonan Si, Wendong Zhang
semanticscholar   +1 more source

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