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0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method

open access: yesMicrosystems & Nanoengineering
Microelectromechanical systems (MEMS) gyroscopes with higher precision have always been a focal point of research. Due to limitations in resonant structure, fabrication processes, and measurement and control techniques, MEMS gyroscopes with bias ...
Liangqian Chen   +7 more
doaj   +1 more source

High performance MEMS gyroscopes

open access: yes, 2020
ÖZYÜKSEK PERFORMANSLI MEMS DÖNÜÖLÇERLERAzgın, KıvançYüksek Lisans, Elektrik ve Elektronik Mühendisliği BölümüTez Yöneticisi: Prof. Dr. Tayfun AKINŞubat 2007, 151 sayfaBu tez tek, çift ve dört kütleye sahip üç değişik yüksek performanslı, düşük g-hassasiyetlidönüölçerin geliştirilmesini anlatmaktadır.
openaire   +1 more source

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