Experimental validation results for a parametrically excited MEMS gyroscope [PDF]
This paper reports experimental results for a vibratory MEMS gyroscope which is parametrically excited. Actuation and sensing are performed electrostatically. The equation of motion for the primary mode of vibration of the electrostatically actuated MEMS
Gallacher BJ +3 more
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A Fault Diagnosis Method of Four-Mass Vibration MEMS Gyroscope Based on ResNeXt-50 with Attention Mechanism and Improved EWT Algorithm. [PDF]
Micromachines (Basel), 2023 Gu Y +6 more
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Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System. [PDF]
Sensors (Basel), 2022 Din H, Iqbal F, Park J, Lee B.
europepmc +1 more source
Adaptive Force-Balancing Control of MEMS Gyroscope with Actuator Limits [PDF]
, 2004 This work presents an adaptive force-balancing control (AFBC) scheme with actuator limits for a MEMS Z-axis gyroscope. The purpose of the adaptive force-balancing control is to identify major fabrication imperfections so that they are properly ...
Sarangapani, Jagannathan +1 more
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Disturbance Rejection in MEMS Gyroscope: Problems and Solutions [PDF]
, 2011 This paper presents a summary of the recent developments in practical applications of the activedisturbance rejection control (ADRC) on MEMS gyroscopes.
Gao, Zhiqiang, Zheng, Qing
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A Temperature Drift Suppression Method of Mode-Matched MEMS Gyroscope Based on a Combination of Mode Reversal and Multiple Regression. [PDF]
Micromachines (Basel), 2022 Chen L +6 more
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Design and Analysis of a MEMS Vibratory Comb Gyroscope [PDF]
, 2009 © ASEE 2009MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and mechanical components in the scale of microns.
Xiong, Xingguo, Dong, Haifeng
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Microsystems & NanoengineeringMicroelectromechanical systems (MEMS) gyroscopes with higher precision have always been a focal point of research. Due to limitations in resonant structure, fabrication processes, and measurement and control techniques, MEMS gyroscopes with bias ...
Liangqian Chen +7 more
doaj +1 more source
Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method. [PDF]
Micromachines (Basel), 2022 Bu F, Guo S, Fan B, Wang Y.
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Method for suppresion of G-sensitivity of MEMS gyroscope [PDF]
, 2017 The invention relates to provide a method for suppression of the g-sensitivity of MEMS gyroscope (1) by keeping the movable sense frame of the gyroscope stationary irrespective to the external accelerations with the aid of closed-loop feedback circuit ...
Akın, Tayfun +2 more
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