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Microprocessing of MEMS gyroscopes

2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus), 2018
Application of laser radiation for materials microprocessing is widely used in various fields of science and technology today. The paper discusses the possibility of balancing the elements of MEMS gyroscope by using exposure for laser radiation. As a result of studying the parameters of the laser modification of silicon.
Lyudmila I. Dolgovykh   +1 more
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MEMS Gyroscope FEM Modeling and Simulation

2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES), 2018
This paper the analysis of a 3D model of MEMS Gyroscope is presented. The FEM analysis of the 3D structure has been performed in very popular COMSOL Multiphysics software. Authors took particular attention on mechanical behaviour particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense ...
Jacek Nazdrowicz   +3 more
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Analysis and compensation of MEMS gyroscope drift

2013 Seventh International Conference on Sensing Technology (ICST), 2013
Compared with traditional rate sensors, the Micro Electro Mechanical System (MEMS) gyroscope is smaller, lighter, cheaper and lower in power consumption. Thus, it has been widely used in consumer electronics, automation electronics and inertial navigation systems.
Zhanlin Diao   +3 more
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MEMS Gyroscopes as Physical Unclonable Functions

Proceedings of the 2016 ACM SIGSAC Conference on Computer and Communications Security, 2016
A key requirement for most security solutions is to provide secure cryptographic key storage in a way that will easily scale in the age of the Internet of Things. In this paper, we focus on providing such a solution based on Physical Unclonable Functions (PUFs).
Oliver Willers   +3 more
openaire   +1 more source

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