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Capacitive vs Piezoresistive MEMS Gyroscopes: A Theoretical and Experimental Noise Comparison [PDF]
Procedia Engineering, 2015 This work aims both at theoretically formalizing a comparison between piezoresistive (PZR) and capacitive (CAP) gyroscopes in terms of resolution limits, and at validating the predictions through experimental measurements on MEMS devices of both types ...
Giacci, F. +5 more
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MEMS Gyroscopes’ Noise Simulation Algorithm
2019MEMS gyroscopes are advantageous devices that promote a wide range of applications, however, they suffer from various stochastic errors some of which accumulate over time (angle random walk, bias random walk). To be able to use such devices, one should apply mathematical models of stochastic processes and hardware-software tools for investigation into ...
Dmytro V. Fedasyuk, Tetyana Marusenkova
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Reliability of vacuum packaged MEMS gyroscopes
Microelectronics Reliability, 2005The greatest challenge for the successful commercialization of MEMS (micro-electro-mechanical system) technology is proving its reliability. Of concern in particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out
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System modeling of MEMS Gyroscopes
2007 Mediterranean Conference on Control & Automation, 2007This paper presents a systematic approach to obtain governing equations of Micro Electro Mechanical Gyroscopes. The focus will be on vibratory type and its mechanical parameters, involved in modeling and designing, will be discussed due to their deep impact on overall performance of Gyroscopes.
Ramyar Rashed, H. Momeni
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2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC), 2016
This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud +3 more
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This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud +3 more
openaire +1 more source
A Parametrically Amplified MEMS Gyroscope
Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT), 2010The applicability of parametric amplification of either the primary and secondary vibration modes of a MEMS gyroscope, shown in Fig.1 is investigated experimentally in this paper. All control schemes have been implemented digitally onto a SHARC DSP development board.
Barry J. Gallacher +3 more
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A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes
Micromachines, 2021Pengfei Xu, Zhenyu Wei, Lu Jia
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Low-frequency learning quantized control for MEMS gyroscopes accounting for full-state constraints
Engineering Applications of Artificial Intelligence, 2022Xingling Shao, Wendong Zhang
exaly
Composite Neural Learning-Based Nonsingular Terminal Sliding Mode Control of MEMS Gyroscopes
IEEE Transactions on Neural Networks and Learning Systems, 2020Bin Xu, Rui Zhang, Shuai Li
exaly