Results 251 to 254 of about 307,394 (254)

MEMS optical mirror array

2004
openaire   +1 more source

MEMS mirror arrays having multiple mirror units

2016
openaire   +2 more sources

LAYER STRUCTURE FOR A MEMS MIRROR DEVICE, METHOD FOR PRODUCING THE LAYER STRUCTURE, AND MEMS MIRROR DEVICE

HOFMANN ULRICH, SENGER FRANK, MARAUSKA STEPHAN, SCHWARZ FABIAN   +3 more
openaire   +1 more source

MEMS mirror with drive rotation amplification of mirror rotation angle

2006
openaire   +1 more source