Results 231 to 240 of about 307,394 (254)

MEMS Test Bench and Its Uncertainty Analysis for Evaluation of MEMS Mirrors

IFAC-PapersOnLine, 2019
Georg Schitter, David Brunner, Han Woong Yoo   +2 more
exaly  

MEMS MIRROR FOR OCT PROBE AND METHOD OF MANUFACTURING SUCH MEMS MIRROR

2019
VAN LIEROP HENDRIKUS WILHELMUS LEONARDUS ANTONIUS MARIA, DE JONG MAAIKE, CLAASSEN GEERT   +2 more
openaire   +3 more sources

MEMS Mirrors for Practical Use

Journal of the Society of Mechanical Engineers, 2013
Kazuhiro HANE, Takashi SASAKI
openaire   +1 more source

Vertical Comb-Drive MEMS Mirror With Sensing Function for Phase-Shift Device

Sensors and Actuators A: Physical, 2012
Kyohei Terao, Takaaki Suzuki, Hidekuni Takao   +2 more
exaly  

Bimorph and MEMS Mirrors

2012
openaire   +1 more source

Parametric Resonance of a Repulsive Force MEMS Electrostatic Mirror

Sensors and Actuators A: Physical, 2017
Shahrzad Towfighian, Meysam Daeichin, Abdallah Ramini   +2 more
exaly  

Stability Study of an Electrothermally-Actuated MEMS Mirror With Al/SiO2 Bimorphs

Micromachines, 2019
Peng Wang, Donglin Wang, Huikai Xie
exaly  

Bimorph and MEMS Mirrors

2009
openaire   +1 more source

Dual-Axis MEMS Mirror for Large Deflection-Angle Using SU-8 Soft Torsion Beam

Sensors and Actuators A: Physical, 2005
Kazusuke MAENAKA, Yoichirô Takayama, Takayuki Fujita   +2 more
exaly  

ASYMMETRIC MEMS MIRROR ASSEMBLY

2017
SHPUNT ALEXANDER, GERSON YUVAL
openaire   +2 more sources