Results 211 to 220 of about 307,394 (254)
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A LiDAR Prototype with Silicon Photomultiplier and MEMS Mirrors
2018 IEEE 4th International Forum on Research and Technology for Society and Industry (RTSI), 2018In this paper, we present a low cost prototype of a Time-Of-Flight (TOF) LiDAR system, employing a SiPM as photo detector and MEMS mirrors in order to steer the nanosecond pulsed optical beam with a scanning angle of +/-6°. Preliminary TOF measurements have been performed both indoor and outdoor to test the limits of the system.
Adamo, Gabriele +3 more
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Stress and curvature in MEMS mirrors
SPIE Proceedings, 2003The goal of this study is to understand how to optimize the performance of micro-mirrors for a variety of optical microsystem applications. Our approach relies on a number of process variations and mirror designs to ultimately produce relatively large (500μm to mm-scale), smooth (for nm RMS), and flat mirrors (greater than 1m curvature).
Fawn R. Gass +7 more
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AlN-based piezoelectric MEMS deformable mirror
Optics Letters, 2023An AlN-based piezoelectric micro-electromechanical system (MEMS) continuous membrane deformable mirror (DM) prototype is presented for the first time. Its effective aperture diameter is 5 mm and it is equipped with 25 independently controlled actuators.
Junning Zhang +4 more
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Microsystem Technologies, 2007
This paper introduces the development of a new MEMS-based optical mirror, which performs optical scanning function with discrete reflection angles in an out-of-plane configuration. The device was fabricated through Deep Reactive Ion Etching (DRIE) process on silicon-on-insulator (SOI) wafer, followed by assembly with two metalised glass dies.
Z. F. Wang +4 more
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This paper introduces the development of a new MEMS-based optical mirror, which performs optical scanning function with discrete reflection angles in an out-of-plane configuration. The device was fabricated through Deep Reactive Ion Etching (DRIE) process on silicon-on-insulator (SOI) wafer, followed by assembly with two metalised glass dies.
Z. F. Wang +4 more
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MEMS arrays for deformable mirrors
SPIE Proceedings, 1995A new class of silicon-based deformable mirror for use in optical applications such as adaptive optical systems and optical correlators is being built. The mirror will be a massively parallel system of electrostatically controlled, interconnected microactuators that can be coordinated to achieve precise actuation and control at a macroscopic level. The
Raji Krishnamoorthy, Thomas G. Bifano
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SPIE Proceedings, 2004
A 1500-μm-diameter silicon/silicon nitride 3D scan mirror has been built using MEMS technology. It is capable of static and dynamic beam scanning achieved with a bi-axial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z-axis) and spherical aberration correction.
Yuhe Shao, David L. Dickensheets
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A 1500-μm-diameter silicon/silicon nitride 3D scan mirror has been built using MEMS technology. It is capable of static and dynamic beam scanning achieved with a bi-axial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z-axis) and spherical aberration correction.
Yuhe Shao, David L. Dickensheets
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Resonant PZT MEMS Mirror with Segmented Electrodes
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct piezoelectric action caused by mechanical motion of the desired mode.
Piot, Adrien +7 more
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The Journal of the Acoustical Society of America, 2010
A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure. A microphone detects the mirror oscillation information.
Arthur Monroe Turner, Varkey George
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A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure. A microphone detects the mirror oscillation information.
Arthur Monroe Turner, Varkey George
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FoveaCam: A MEMS Mirror-Enabled Foveating Camera
2020 IEEE International Conference on Computational Photography (ICCP), 2020Most cameras today photograph their entire visual field. In contrast, decades of active vision research have proposed foveating camera designs, which allow for selective scene viewing. However, active vision's impact is limited by slow options for mechanical camera movement.
Brevin Tilmon +3 more
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MEMS Mirror Controlling System with Holed-PSD
2010 3rd International Conference on Emerging Trends in Engineering and Technology, 2010In this study, we developed a precise 2D MEMS (Micro Electro Mechanical Systems) mirror control system. The system comprises a two-sided mirror and rectangular shaped springs that fabricated on a silicon-on-insulator (SOI) wafer. The mirror movement is detected by a specialized holed position sensitive device (H-PSD), and is proportional-integral ...
Takayuki Fujita +2 more
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