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Photoacoustic endomicroscopy based on a MEMS scanning mirror
Optics Letters, 2017In this Letter, we present a high-resolution photoacoustic endomicroscopy probe based on a microelectromechanical systems (MEMS) scanning mirror. The built-in optical assembly consists of a 0.7 mm graded-index (GRIN) lens for light focusing and a ϕ1 mm MEMS mirror to reflect and scan the beam.
Heng Guo +3 more
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Deformable segmented mems mirror
The Journal of the Acoustical Society of America, 2005A MEMS device having a deformable segmented mirror. The mirror includes a plurality of movable segments supported on a substrate using spring vertices, each vertex having a fixed plate and one or more springs. In a representative embodiment, three springs support each movable segment, where each spring connects the movable segment to a different spring
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Sense and Control of Oscillating MEMS Mirrors
2022 25th Euromicro Conference on Digital System Design (DSD), 2022Norbert Druml +3 more
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An iterative model for MEMS deformable mirrors
2011We present a high accuracy Micro-Electro-Mechanical-System (MEMS) deformable mirror (DM) control algorithm currently implemented in the real-time control interface of the Subaru Coronagraphic Extreme Adaptive Optics project (SCExAO). MEMS DMs are an attractive DM technology for Extreme-AO (ExAO) because they offer unprecedented actuator density and ...
Blain, Celia +4 more
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AlScN Based MEMS Quasi-Static Mirror Matrix With Large Tilting Angle and High Linearity
Sensors and Actuators A: Physical, 2020Simon Fichtner
exaly
Reliability in MEMS mirror device
The Proceedings of Mechanical Engineering Congress, Japan, 2017Yuichi YAMAMURA, Mitsuru KOARAI
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