Results 91 to 100 of about 865 (177)

Resonance-based MEMS temperature sensors for temperature compensation of mems capacitive accelerometer

, 2020
Micro-Electro-Mechanical Systems (MEMS) having capacitive sensing mechanism have been gaining interest as a result of low-cost, small-size, and high-reliability sensors applications. Today micromachined capacitive sensors find different places in many areas ranging from many military to industrial applications such as inertial navigation, vibration ...
openaire   +1 more source

A High Resolution Differential Mode-Localized MEMS Accelerometer

, 2019
A novel differential configuration of a high-resolution mode-localized resonant SOI-MEMS accelerometer is presented in this paper. An effective maximum scale factor of 11/g and a bias-stability of 2.96μg is demonstrated. A minimum noise floor of 3μg/√ Hz
Zhao, C, Seshia, A, Zou, X, Pandit, M, Sobreviela, G, ,   +5 more
core  

Improved detection structure for a z-axis resonant accelerometer

, 2012
The present invention relates to an improved detection structure for a resonant accelerometer with vertical axis (so-called "z-axis"), of a MEMS (microelectromechanical system) or NEMS (nanoelectromechanical system) type, in particular one capable of ...
S. Zerbini, CORIGLIANO, ALBERTO, COMI, CLAUDIA   +2 more
core  

Research on Surface Mounting Technology of Micromechanical Silicon Resonant Accelerometer

, 2013
Surface mounting technology is a key process in MEMS packaging. The finite element model of package structures was established in this paper according to the designed micromechanical silicon resonant accelerometer.
Huang, Libin, Gao, Yang
core  

Analysis of a low frequency MEMS capacitive accelerometer under the effect of biasing voltage for detection of Parkinsons tremor

The paper presents a comprehensive analysis of the design and simulation of a MEMS differential capacitive accelerometer optimized for the detection of tremor signals in Parkinson’s disease patients.
Jacopo Iannacci, Narayan Krishnaswamy, Koushik Guha, M. Preeti, K. L. Baishnab, Massimo Donelli   +5 more
core   +1 more source

Characterization of Squeeze Film Damping in Force Rebalance Accelerometers. [PDF]

Sensors (Basel)
Özmen HB, Şahin M, Özgen GO.
europepmc   +1 more source

Quadrature error cancellation for micro-machined vibratory gyroscope embedded in high order electromechanical Sigma Delta modulator

, 2013
Vibratory micro-machined gyroscopes utilize Coriolis force to detect the rotation rate. Recently it has been proved that embedding the gyroscope in an electromechanical ΣΔ modulator (EMSDM), results in increased linearity, rate detection range, and ...
Salimi, Pejwaak
core  

Electrostatic anti-spring-enhanced MEMS accelerometer with auto-tuning capability. [PDF]

Microsyst Nanoeng
Wang C, Yuan Y, Shojaeian M, Sadeghpour S, Liu H, Wang Y, Gao H, Dou JH, Zhang P, Martins RP, Mak PI.   +10 more
europepmc   +1 more source

Deep learning-driven performance prediction and design of high-DoF MEMS resonators. [PDF]

Microsyst Nanoeng
Jia Z, Wu C, Li M, Yan W, Wang X, Lei M, Sun J, Wu S, Shi C, Tan D, Li W, Wang Y, Li P, Lu Q.   +13 more
europepmc   +1 more source

A Novel Asymmetric High-Performance MEMS Pendulum Capacitive Accelerometer. [PDF]

Micromachines (Basel)
Dong G, Jiang J, Wu W, Zhang Z, Cao J, Gao Z, Liu H.   +6 more
europepmc   +1 more source