Results 251 to 253 of about 2,133 (253)
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Lamé Mode MEMS Resonators
2015
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(10.1007/978-94-017-9780-1_101001)
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MEMS Resonant Thermal Sensors
2016
openaire
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(10.1007/978-94-017-9780-1_100542)
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Thermally Actuated MEMS Resonators
2016
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(10.1007/978-94-017-9780-1_101120)
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mems
7. clean energy
resonators
mems resonator
cmos-mems
physics
quality factor
microelectromechanical systems
piezoelectric
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