Results 1 to 10 of about 2,391 (245)
Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors [PDF]
Sensors, 2020 A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (
Marco Bau, , Habiba Begum
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An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression [PDF]
Microsystems & NanoengineeringSilicon-based MEMS resonators have shown promising potential to replace quartz crystal resonators in many fields, especially in realizing precise timing.
Yutao Xu +4 more
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Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
Micromachines, 2021 Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to ...
Yusi Zhu, Zhen Fang, Lidong Du
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Characterization of a MEMS resonator with extended hysteresis
IEICE Electronics Express, 2011 In this paper an electrostatically driven MEMS resonator with resonance and hysteresis characteristics is reported. The resonator begins to exhibit spring-hardening effect at ac excitation voltage of 105mV and dc bias voltage of 5V in vacuum at 50Pa.
Takashi Hikihara
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High-velocity laser Doppler vibrometry measurements on an aluminum nitride bimorph wedge resonator [PDF]
Communications EngineeringRecent advances in microelectromechanical systems (MEMS) have advanced inertial sensor technology. For resonant gyroscopes, sensitivity scales with the maximum velocity of the resonating mass, as higher velocities amplify the Coriolis force for faster ...
Zihuan Liu +7 more
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A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing [PDF]
Microsystems & NanoengineeringThe development of multifunctional MEMS resonators has long been constrained by the challenge of integrating high-sensitivity sensing and high-stability frequency referencing into a single compact device.
Jiao Xu +7 more
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Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review [PDF]
Microsystems & NanoengineeringRecent advances in microelectromechanical systems (MEMS) resonators have enabled the development of compact devices capable of precise magnetic and electric field sensing.
Daeyeon Koh, Yohan Jung, Jongbaeg Kim
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Micromachines, 2023 This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level ...
Tianren Feng, Duli Yu, Bo Wu, Hui Wang
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MEMS Magnetic Field Source for Frequency Conversion Approaches for ME Sensors
Current Directions in Biomedical Engineering, 2022 Some magnetoelectric sensors require predefined external magnetic fields to satisfy optimal operation depending on their resonance frequency. While coils commonly generate this external magnetic field, a microelectromechanical systems (MEMS) resonator ...
Arbustini Johan +12 more
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Mathematics, 2023 This paper deals with chaos control in an arch microelectromechanical system (MEMS) from the fractional calculus perspective. There is a growing need for effective controllers in various technological fields, and it is important to consider disruptions ...
Hajid Alsubaie +4 more
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