Results 21 to 30 of about 2,391 (245)
Phase Noise Reduction in a VHF MEMS-CMOS Oscillator Using Phononic Crystals
IEEE Journal of the Electron Devices Society, 2016 This paper presents experimental results showing reduced phase noise in a very high frequency band microelectromechanical systems (MEMS) oscillator. This has been achieved by engineering the embedded MEMS resonator with phononic crystal structures.
Pei Qin +3 more
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Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators
Scientific Reports, 2022 Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely ...
Chun-You Liu, Sheng-Shian Li
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Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process
IEEE Journal of the Electron Devices Society, 2017 A Nb superconducting tunable microstrip gap resonator has been designed and fabricated with low stress Au RF MEMS dc-contact switches. The resonator can be tuned in four states from 12-15 GHz.
Robert R. Benoit, N. Scott Barker
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A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator
Sensors, 2019 In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator.
Dunzhu Xia, Lingchao Huang, Liye Zhao
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Micromachines, 2021 This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators.
Muhammad Mubasher Saleem +5 more
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Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator
Micromachines, 2018 Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is ...
Xin Zhou +10 more
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Terahertz Detectors Using Microelectromechanical System Resonators
Sensors, 2023 The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature.
Chao Li, Ya Zhang, Kazuhiko Hirakawa
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Multistability of the Vibrating System of a Micro Resonator
Fractal and Fractional, 2022 Multiple attractors and their fractal basins of attraction can lead to the loss of global stability and integrity of Micro Electro Mechanical Systems (MEMS).
Yijun Zhu, Huilin Shang
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Internal resonance in a MEMS levitation force resonator
Nonlinear Dynamics, 2022 In this work, we explore internal resonances in a levitation force microelectromechanical system-based actuator assuming flexible cantilever and clamped–clamped microbeam configurations. The levitation force is generated through a special arrangement of two-side stationary charged substrates and a central grounded stationary strip.
Mohammadreza Zamanzadeh +2 more
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Joint Effect of Heterogeneous Intrinsic Noise Sources on Instability of MEMS Resonators [PDF]
Electronics, 2015 This article's focus is on the numerical estimation of the overall instability of microelectromechanical-system-based (MEMS) resonators, caused by intrinsic noise mechanisms that are different in nature (electrical, mechanical or chemical). Heterogeneous
Olga Jakšić +6 more
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