Results 11 to 20 of about 2,391 (245)
Electromagnetic silicon MEMS resonator [PDF]
Electrical Engineering in Japan, 2018 AbstractWe have fabricated a silicon MEMS resonator aiming at multimodal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the resonance frequency is shifted toward the low ...
Yoshiyuki Watanabe +3 more
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The Recent Progress of MEMS/NEMS Resonators [PDF]
Micromachines, 2021 MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing ...
Lei Wei +8 more
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Towards Portable MEMS Oscillators for Sensing Nanoparticles
Sensors, 2022 This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment.
Malar Chellasivalingam +4 more
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Silicon on nothing MEMS electromechanical resonator [PDF]
Microsystem Technologies, 2007 Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Durand, Cédric +9 more
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Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II
Micromachines, 2023 Although one of the poster children of high-performance MEMS (Micro Electro Mechanical Systems) gyroscopes, the MEMS hemispherical resonator gyroscope (HRG) is faced with the barrier of technical and process limits, which makes it unable to form a ...
Jinghao Liu +7 more
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A Battery-Less Wireless Respiratory Sensor Using Micro-Machined Thin-Film Piezoelectric Resonators
Micromachines, 2021 In this work, we present a battery-less wireless Micro-Electro-Mechanical (MEMS)-based respiration sensor capable of measuring the respiration profile of a human subject from up to 2 m distance from the transceiver unit for a mean excitation power of 80 ...
Sina Moradian +4 more
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2009 Spanish Conference on Electron Devices, 2009 This work shows the application of Pulsed Digital Oscillators to the detection of physical changes in MEMS devices that cause small shifts in their resonance frequencies. Such devices can be used as resonators in several sensor applications. According to this, a case study using a PDO structure to measure small concentrations of volatile organic gas ...
Ricart Campos, Jordi +3 more
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Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
Sensors, 2020 Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Rafel Perello-Roig +3 more
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CMOS-MEMS Oscillator Architecture and Phase Noise: A Mini-Review
Frontiers in Mechanical Engineering, 2022 Over the past two decades, the advancement in microelectromechanical systems (MEMS) has been making headway in the development of miniaturized mechanical structures with integrated electronics.
Ming-Huang Li
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Three-to-One Internal Resonance in MEMS Arch Resonators [PDF]
Sensors, 2019 We present an investigation of the nonlinear dynamics of a microelectromechanical system (MEMS) arch subjected to a combination of AC and DC loadings in the presence of three-to-one internal resonance. The axial force resulting from the residual stress or temperature variation is considered in the governing equation of motion.
Ze Wang, Jianting Ren
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