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Polarity-Dependent Charge Transport and Resistance Degradation Enabled by Oxygen-Vacancy Gradients in BiFeO<sub>3</sub> Films. [PDF]

open access: yesACS Appl Mater Interfaces
Aphayvong S   +6 more
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Future of microelectromechanical systems (MEMS)

Sensors and Actuators A: Physical, 1996
Abstract The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is unrealistic to consider micromachining technology as a micro version of conventional machining technology.
Minhang Bao, Weiyuan Wang
openaire   +3 more sources

Materials issues in microelectromechanical systems (MEMS)

Acta Materialia, 2000
Abstract Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales.
S M Spearing
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