Chemoresistive and Catalytic Dual-Signal Pd-WO<sub>3</sub> MEMS Sensor for Reliable H<sub>2</sub> Monitoring. [PDF]
Park SJ +7 more
europepmc +1 more source
Identification of Mechanical Parameters of the Silicon Structure of a Capacitive MEMS Accelerometer. [PDF]
Kurpanik K +4 more
europepmc +1 more source
Deep learning-based technique for investigating the behavior of MEMS systems with multiwalled carbon nanotubes and electrically actuated microbeams. [PDF]
Amir M +5 more
europepmc +1 more source
Compact, scan-pattern-switchable 2D piezoelectric MEMS mirror with 1D addressable scanning. [PDF]
Yu J +7 more
europepmc +1 more source
Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators. [PDF]
Xiao Y, Sun C, Liu S, Wu G.
europepmc +1 more source
A capacitive-piezoelectric hybrid MEMS microphone with signal fusion for enhancing signal-to-noise ratio. [PDF]
Guan Y +10 more
europepmc +1 more source
A Review of Solid-State LiDAR Principles and Metasurface-Based LiDAR Sensors. [PDF]
Demirbas E +6 more
europepmc +1 more source
Design, Fabrication and Characterization of Multi-Frequency MEMS Transducer for Photoacoustic Imaging. [PDF]
Prud'homme A, Nabki F.
europepmc +1 more source

