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A Dynamic Stress Analyzer for Microelectromechanical Systems (MEMS) Based on Raman Spectroscopy
Journal of Raman Spectroscopy, 2007Binzhen Zhang, Aoqun Jian, Xue Chenyang
exaly
Microelectromechanical systems (MEMS) and methods
2020TRIPATHI DHIRENDRA +5 more
openaire +1 more source
Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS)
2006Rebecca Cheung
exaly
Microelectromechanical systems (MEMS) devices and systems
2009 35th Annual Conference of IEEE Industrial Electronics, 2009openaire +1 more source
Microelectromechanical systems (MEMS) for in vivo applications
2013A. Vasudev, S. Bhansali
openaire +1 more source

