Results 161 to 170 of about 5,809 (181)
Some of the next articles are maybe not open access.

Microelectromechanical systems (MEMS) devices and systems

IECON 2010 - 36th Annual Conference on IEEE Industrial Electronics Society, 2010
openaire   +1 more source

Carbon Microelectromechanical Systems (C-MEMS) Based Microsupercapacitors

Proceedings of SPIE, 2015
Chunlei Wang   +2 more
exaly  

Optical Deflection Measurement for Characterization of Microelectromechanical Systems (MEMS)

IEEE Transactions on Instrumentation and Measurement, 2004
R L Edwards, H K Charles, S L Firebaugh
exaly  

Synchronization of microelectromechanical system (MEMS) mirrors

2022
DRUML NORBERT   +5 more
openaire   +2 more sources

Transport Phenomena and Microelectromechanical Systems (MEMS)

Proceeding of International Heat Transfer Conference 12, 2002
openaire   +1 more source

Microelectromechanical systems (MEMS) gyroscope calibration

2021
DAKSHINAMURTHY SRIRAMAN   +4 more
openaire   +1 more source

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