Results 181 to 190 of about 88,689 (248)
Some of the next articles are maybe not open access.
A dynamic stress analyzer for microelectromechanical systems (MEMS) based on Raman spectroscopy
Journal of Raman Spectroscopy, 2007Aoqun Jian
exaly +2 more sources
The teaching of microelectromechanical systems (MEMS)
Proceedings 1999 IEEE International Conference on Microelectronic Systems Education (MSE'99) 'Systems Education in the 21st Century' (Cat. No.99-63794), 2003MEMS technology is now where integrated circuit technology was about 30 years ago. It is clearly going to be pervasively important. Both commercial volume and patents on MEMS are growing at rates exceeding 20% annually. The teaching of MEMS technology, now in its early stages, must keep pace.
Mona E. Zaghloul, David J. Nagel
openaire +1 more source
Journal of Micromanufacturing, 2019
The recent success of additive manufacturing processes (also called, 3D printing) in the manufacturing sector has led to a shift in the focus from simple prototyping to real production-grade technology.
Sanjay Kumar +3 more
semanticscholar +1 more source
The recent success of additive manufacturing processes (also called, 3D printing) in the manufacturing sector has led to a shift in the focus from simple prototyping to real production-grade technology.
Sanjay Kumar +3 more
semanticscholar +1 more source
INTRODUCTION TO SILICON CARBIDE (SIC) MICROELECTROMECHANICAL SYSTEMS (MEMS)
2006Rebecca Cheung
exaly +2 more sources
Microelectromechanical systems (MEMS) for in vivo applications
2013A. Vasudev, S. Bhansali
openaire +2 more sources
The Future of Microelectromechanical systems (MEMS)
Strain, 2009Abstract: MEMS‐based products produced in 2005 had a value of $8bn, 40% of which was sensors. The balance was for products that included micromachined features, such as ink jet print heads, catheters and RF IC chips with embedded inductors. Growth projections follow a hockey stick curve, with the value of products rising to $40bn in 2015 and $200bn in
openaire +1 more source
Packaging and Microelectromechanical Systems (MEMS)
2007 8th International Conference on Electronic Packaging Technology, 2007Packaging is critical to the advancement of microsystems integrating microelectromechanical systems (MEMS) with microelectronic, optoelectronic and microwave devices. This paper discusses microsystems packaging with three cases: a) packaging of MEMS: flip-chip assembly to interconnect MEMS devices with other components; b) packaging for MEMS: novel ...
openaire +1 more source
Characterization of a Microelectromechanical Systems (MEMS) Microphone
14th AIAA/CEAS Aeroacoustics Conference (29th AIAA Aeroacoustics Conference), 2008*† A method for characterizing non-condenser microphone frequency response up through at least 100 kHz has been developed and validated. This method exposes a device under test microphone and a reference microphone to the same acoustic field. A frequency response function between the two devices is then determined through a sequence of measurements and
J. Patrick King, James Underbrink
openaire +1 more source
Exploring Microelectromechanical Systems (MEMS) and Their Manufacturing Processes
Series in BioengineeringSeyed Morteza Naghib, Yasaman Rezaeian
exaly +2 more sources
Nano/Microelectromechanical Systems (NEMS/MEMS)
2020Micro/nanoelectromechanical systems (M/NEMS) is a process technology that integrates both electrical and mechanical components with dimensions in micron/nanometer. M/NEMS technologies have attracted the attention of researchers in both scientific studies and technical applications.
Prasantha R. Mudimela, Rekha Chaudhary
openaire +1 more source