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Failure Analysis Issues in Microelectromechanical Systems (MEMS)

Microelectronics Reliability, 2005
Abstract Failure analysis and device characterization of MEMS components are critical steps in understanding the root causes of failure and improving device performance. At the wafer and die level these tasks can be performed with little or no sample preparation.
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U-sequence in electrostatic microelectromechanical systems (MEMS)

Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, 2006
In this paper, the presence ofU(Universal)-sequence (a sequence of periodic windows that appear beyond the period doubling (PD) route to chaos) in electrostatic microelectromechanical systems (MEMS) is reported. The MEM system is first brought to a nonlinear steady state by the application of a large dc bias close to the dynamic pull-in voltage of the ...
De, Sudipto K., Aluru, N. R.
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Embedded Microelectromechanical Systems(MEMS) for Measuring Strain in Composites

Journal of Reinforced Plastics and Composites, 2000
Microelectromechanical strain sensors were fabricated and embedded in laminated composites. These small scale sensors were designed to function as part of a wireless sensing network. The sensing element, signal conditioning, and telemetry circuitry have been developed to be fabricated on a single silicon wafer.
CHARLES HAUTAMAKI   +3 more
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Smart structures and microelectromechanical systems (MEMS)

The Journal of the Acoustical Society of America, 1999
Capacitor transducers have been around for as long as piezoelectric transducers. They have not presented much competition for piezoelectric transducers as transmitters and receivers because the method of their manufacture did not optimize and highlight their performance.
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The future is MEMS design considerations of microelectromechanical systems at Bosch

2015 22nd International Conference Mixed Design of Integrated Circuits & Systems (MIXDES), 2015
The Robert Bosch GmbH is the world's largest supplier of micromechanical sensors in automotive and consumer applications. Achieving a high quality and cost effectiveness in automotive and consumer applications an advanced design flow is required to fulfill these criteria.
Mike Schwarz   +2 more
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Microelectromechanical System (MEMS) Switch Test

2011
Abstract : Analyzing microelectromechanical system (MEMS) switch behavior is a new field of study, which guides the production of MEMS switches. I analyzed switch behavior using a digital circuit synthesized on a field-programmable gate array (FPGA) chip.
Tony Ivanov, Stanley Karter
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Advantages of piezoelectric microelectromechanical systems (MEMS) microphones.

The Journal of the Acoustical Society of America, 2009
Microphones fabricated using microelectromechanical systems (MEMS) technology are one of the fastest growing applications of MEMS. Capacitive sensing has been the dominant form of transduction in both traditional and recently commercialized MEMS microphones. Models and experiments, however, indicate that the thin layers and fine spatial resolution made
Robert Littrell, Karl Grosh
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Computer-aided design for microelectromechanical systems (MEMS)

International Journal of Materials and Product Technology, 2003
With the advancements of MEMS foundry services and CAD tools, MEMS devices can be cost-effectively designed and prototyped. Here, four designs that utilise these tools are presented:(1) a flexure design used to reduce the device warpage resulting from the mismatch in thermal expansion coefficients between the device and the substrate for flip-chip ...
Y.C. Lee   +4 more
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Microelectromechanical systems (MEMS): Applications for NDE?

AIP Conference Proceedings, 2002
In the past 15 years, micro-electro-mechanical systems (MEMS) have become a topic of widespread research, development and commercialization. Made by augmented integrated circuit fabrication techniques and having at least one dimension in the micron range, these devices have been used in computer printers and in vehicles for airbag deployment, and they ...
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Testing requirements for microelectromechanical systems (MEMS)

1998 IEEE AUTOTESTCON Proceedings. IEEE Systems Readiness Technology Conference. Test Technology for the 21st Century (Cat. No.98CH36179), 2002
This presentation addresses some of these challenges and outlines potential approaches to overcoming them. Examples of the many energy domains encountered in MEMS devices will be provided and potential strategies for evaluating MEMS device performance in these domains will be discussed.
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