Results 211 to 220 of about 88,689 (248)

The strain gradient effect in microelectromechanical systems (MEMS)

, 2002
Zhenyu Xue, M. Saif, Yonggang Huang
semanticscholar   +1 more source

The role of the casimir effect in the static deflection and stiction of membrane strips in microelectromechanical systems (MEMS)

, 1998
F. Serry, D. Walliser, G. Maclay
semanticscholar   +1 more source

Wet-Etch Patterning of Lead Zirconate Titanate (PZT) Thick Films for Microelectromechanical Systems (MEMS) Applications

, 2000
L.-P. Wang, R. Wolf, Q. Zhou, S. Trolier-McKinstry, R. Davis   +4 more
semanticscholar   +1 more source

Microelectromechanical systems (MEMS): an overview of current state-of-the-art

IEEE Aerospace Conference. Proceedings, 1998
A. Madni, L. A. Wan
semanticscholar   +1 more source

Molecular lubricants for silicon‐based microelectromechanical systems (MEMS): a novel assembly strategy

, 1999
X.Y. Zhu, J. Houston
semanticscholar   +1 more source

The effects of ionizing radiation on microelectromechanical systems (MEMS) actuators: electrostatic, electrothermal, and bimorph

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 2004
J.R. Caffey, P. Kladitis
semanticscholar   +1 more source

Diamond and hard carbon films for microelectromechanical systems (MEMS)—a nanotribological study

, 2002
I. S. Forbes, John I. B. Wilson
semanticscholar   +1 more source

Modeling of Wet Stiction in Microelectromechanical Systems (MEMS)

Journal of microelectromechanical systems, 2007
A. Hariri, J. Zu, R. Mrad
semanticscholar   +1 more source

Design of a Microactuator Array Against the Coupled Nature of Microelectromechanical Systems (MEMS) Processes

, 2000
Sang-Gook Kim, M. Koo
semanticscholar   +1 more source

Temperature and moisture monitoring in concrete structures using embedded nanotechnology/microelectromechanical systems (MEMS) sensors

, 2008
A. Norris, M. Saafi, P. Romine
semanticscholar   +1 more source