Results 231 to 240 of about 88,689 (248)

Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

IEEE Electron Device Letters, 2002
L.-P. Wang, K. Deng, L. Zou, R. Wolf, R. Davis, S. Trolier-McKinstry   +5 more
semanticscholar   +1 more source

Measurement and Modeling of Adhesion Energy Between Two Rough Microelectromechanical System (MEMS) Surfaces

Journal of Adhesion Science and Technology, 2008
Andreas A Polycarpou, Leslie M Phinney
exaly  

Characteristics and Selection of Materials Used in Microelectromechanical Systems (MEMS) ☆

2018
G K Sujan
exaly  

Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

Proceedings of SPIE, 2015
Richa Agrawal, Majid Beidaghi, Chunhui Chen   +2 more
exaly  

Microelectromechanical systems (MEMS)

Sensornieuws, 1993
openaire   +1 more source

A review on temperature coefficient of frequency (TCf) in resonant microelectromechanical systems (MEMS)

Applied Physics Reviews
Wen Sui, Stephen J Pearton, Philip X-L Feng   +2 more
exaly  

Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theory

Journal of Adhesion Science and Technology, 2003
Kyriakos Komvopoulos
exaly  

Transport Phenomena and Microelectromechanical Systems (MEMS)

Proceeding of International Heat Transfer Conference 12, 2002
openaire   +1 more source

Microelectromechanical Systems (MEMS) Based-Ultrasonic Electrostatic Actuators on a Flexible Substrate

IEEE Electron Device Letters, 2012
Junseok Chae
exaly  

Reconfigurable hydrophobic/hydrophilic surfaces in microelectromechanical systems (MEMS)

, 2004
J. Deval, Teodoro A. Umali, E. Lan, B. Dunn, Chih-Ming Ho   +4 more
semanticscholar   +1 more source