Results 241 to 248 of about 88,689 (248)

The Analysis of the Appropriateness of the Microelectromechanical Systems Sensor Devices (MEMS) Construction on the base of the Active Semiconductor Elements

2006
Vasyl M Teslyuk
exaly  

Microelectromechanical Systems ( MEMS )

2008
Glauco Feltrin
exaly  

Fabrication and Characterizations of Microelectromechanical Systems (MEMS) Thermal Conductivity Gas Sensor

Journal of Nanoelectronics and Optoelectronics, 2018
exaly  

MEMS-Based Terahertz Components and Systems: Bridging the Terahertz Gap With Microelectromechanical Systems

Cecile Jung-Kubiak, Sofia Rahiminejad, Joachim Oberhammer   +2 more
exaly  

Integrated microelectromechanical systems: A perspective on MEMS in the 90s

Precision Engineering, 1992
openaire   +1 more source

Ferroelectric Devices for Microelectromechanical Systems (mems) Applications

2000
D POLLA, W ROBBINS
openaire   +1 more source

Introduction to Microelectromechanical Systems (MEMS): Design and Application

exaly  

Microelectromechanical Systems (MEMS) for Tunable Plasmon Coupling

2014
Imboden, Matthias, Unlu, Selim, Stark, Thomas, Bishop, David, Chang, Jackson, Erramilli, Shyamsunder, Mertiri, Alket, Yilmaz, Ahmet, KAYA, Sabri   +8 more
openaire   +1 more source