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Challenges in interconnection and packaging of microelectromechanical systems (MEMS)
2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070), 2000Rajeshuni Ramesham, Rem Ghaffarian
semanticscholar +1 more source
Microelectromechanical systems (MEMS) devices and systems
2009 35th Annual Conference of IEEE Industrial Electronics, 2009openaire +1 more source
Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin ZdolĀ®
, 2002K. C. Eapen, S. Patton, J. Zabinski
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Microelectromechanical systems (MEMS) devices and systems
IECON 2010 - 36th Annual Conference on IEEE Industrial Electronics Society, 2010openaire +1 more source
Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective
, 2003S. Tadigadapa, N. Najafi
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Total dose effects on Microelectromechanical Systems (MEMS): accelerometers
, 1996C. I. Lee +4 more
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