Results 201 to 210 of about 88,689 (248)

INNOVATIONS IN MICROELECTROMECHANICAL SYSTEMS (MEMS)

EKONOMIKA I UPRAVLENIE: PROBLEMY, RESHENIYA
The article reviews current innovations in the field of microelectromechanical systems (MEMS), including recent advances in materials, manufacturing technologies, and design. Particular attention is paid to the integration of MEMS with other technologies, such as nanoelectromechanical systems (NEMS) and microelectronics.
openaire   +1 more source

Future aspects of MEMS in Germany [microelectromechanical systems]

IECON '98. Proceedings of the 24th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.98CH36200), 1998
The integration of electronic, acoustic, mechanical, thermal, optical and magnetic functions within one product is one of the great challenges for future microelectromechanical systems (MEMS) today. The development of advanced materials plays a key role for the design and development of new MEMS.
M. Topfer, M. Werner, E. Kaulfersch, H. Reichl   +3 more
openaire   +1 more source

Computer Microvision for Microelectromechanical Systems (MEMS)

2003
Abstract : This effort successfully addressed a critical need related to the early design and evaluation of Microelectromechanical systems (MEMS) by developing tools and methods for testing and characterizing MEMS devices that enabled in situ visualization of the motions of internal structures in MEMS by combining light microscopy, video imaging, and ...
openaire   +1 more source

Microelectromechanical systems (MEMS): fabrication, design and applications

, 2001
J. Judy
semanticscholar   +1 more source

Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems

, 2000
V. Varadan, V. Varadan
semanticscholar   +1 more source

The reliability of microelectromechanical systems (MEMS) in shock environments

, 2002
V. T. Srikar, S. Senturia
semanticscholar   +1 more source

Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

, 1998
J. Wibbeler, G. Pfeifer, M. Hietschold
semanticscholar   +1 more source

An Overview of Reliability and Failure Mode Analysis of Microelectromechanical Systems (MEMS)

, 2008
Yuanbo Li, Zhibin Jiang
semanticscholar   +1 more source

MEMS = Microelectromechanical Systems

2012
Gabriela Juarez-Martinez, Alessandro Chiolerio, Paolo Allia, Martino Poggio, Christian L. Degen, Li Zhang, Bradley J. Nelson, Lixin Dong, Mitsumasa Iwamoto, Markus J. Buehler, Graham Bratzel, Farghalli A. Mohamed, Nathan Doble, Alok Govil, Ion Bita, Evgeni Gusev, Jung-Tang Huang, Kuo-Yu Lee, Hou-Jun Hsu, Pen-Shan Chao, Chung-Yi Lin, Jit Muthuswamy, Murat Okandan, Donald P. Butler, Zeynep Celik-Butler, Bongsang Kim, Woo-Tae Park, Anisullah Baig, Diana Gamzina, Jinfeng Zhao, Youngmin Shin, Robert Barchfeld, Larry R. Barnett, Calvin Domier, Neville C. Luhmann, Yitzhak Rosen, Pablo Gurman, Craig Snoeyink, Steven T. Wereley, Ranajay Ghosh, Aloke Kumar, Partha P. Mukherjee, Seonghwan Kim, Thomas Thundat, Ashwini Gopal, Kazunori Hoshino, John Xiaojing Zhang, Takahito Ono, Masayoshi Esashi, Soichiro Tsuda, Ryan M. Pocratsky, Maarten P. Boer, Shawn Litster, Clifford W. Padgett, Tad S. Whiteside, Luigi Preziosi, Soichiro Tsuda, Melissa A. Pasquinelli, Yaroslava G. Yingling, Yunfeng Shi, Stuart A. Boden, Darren M. Bagnall, Rita E. Serda, Mauro Ferrari   +63 more
openaire   +1 more source

Behavioral modeling of microelectromechanical systems (MEMS) with statistical performance-variability reduction and sensitivity analysis

, 2000
A. Dewey, H. Ren, T. Zhang
semanticscholar   +1 more source