Results 171 to 180 of about 88,689 (248)

Tunable bound states in the continuum through hybridization of 1D and 2D metasurfaces. [PDF]

Nanophotonics
Kovalev F, Martyniuk M, Miroshnichenko A, Shadrivov I.   +3 more
europepmc   +1 more source

Nonvolatile silicon photonic MEMS switches enabled by van der Waals force. [PDF]

Sci Adv
Hu Y, Zhu J, Peng Y, Hong S, Lyu L, Shi Y, Liu L, Wang J, Li H, Dai D.   +9 more
europepmc   +1 more source

Lifetime testing of a developmental MEMS switch incorporating Au/MWCNT composite contacts

Chianrabutra, Chamaporn, Down, Michael, Jiang, Liudi, Lewis, Adam, McBride, J.W., Spearing, S.M.   +5 more
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Future of microelectromechanical systems (MEMS)

Sensors and Actuators A: Physical, 1996
Abstract The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is unrealistic to consider micromachining technology as a micro version of conventional machining technology.
Minhang Bao, Weiyuan Wang
exaly   +3 more sources

Materials issues in microelectromechanical systems (MEMS)

Acta Materialia, 2000
Abstract Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales.
S. Spearing
exaly   +3 more sources

Optical Deflection Measurement for Characterization of Microelectromechanical Systems (MEMS)

IEEE Transactions on Instrumentation and Measurement, 2004
Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor.
Samara L. Firebaugh, Harry K. Charles Jr., Richard L. Edwards, Allen C. Keeney, Samuel F. Wilderson   +4 more
exaly   +3 more sources

Introduction to applications and industries for microelectromechanical systems (MEMS)

International Test Conference, 2003. Proceedings. ITC 2003., 2004
Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications.
J. Walraven
openaire   +2 more sources

Microelectromechanical systems (MEMS) tutorial

Proceedings International Test Conference 1998 (IEEE Cat. No.98CH36270), 2002
Using the fabrication techniques and materials of microelectronics as a basis, MEMS processes construct both mechanical and electrical components. Mechanical components in MEMS, like transistors in microelectronics, have dimensions that are measured in microns and numbers measured from a few to millions.
K. J. Gabriel
openaire   +2 more sources

Microelectromechanical systems (MEMS)

1997 IEEE Aerospace Conference, 1997
The following topics are dealt with: MEMS fundamentals; MEMS fabrication technology; MEMS market and industry structure; defense applications; investment assessment; inertial measurement devices; multiple device chips; optical MEMS components; monolithic free-space optical disk pickup head; digital micromirror display; optomechanical displays ...
K. J. Gabriel
openaire   +2 more sources

Integrated ferroelectric microelectromechanical systems (MEMS)

Integrated Ferroelectrics, 1995
Abstract A ferroelectric test chip has been fabricated consisting of 1) piezoelectric (PZT) microsensors (accelerometers), 2) low-voltage, 3-μm, n-well CMOS signal conditioning electronics, 3) high-voltage (HVMOS) drive electronics, and 4) PZT microactuator diaphragms and cantilevers.
D. L. Polla, P. J. Schiller
openaire   +2 more sources