Results 21 to 30 of about 88,689 (248)
Sacrificial layer process with laser-driven release for batch assembly operations [PDF]
, 1998 Published ...
Holmes, AS, Saidam, SM
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Microelectromechanical Systems Based on Magnetic Polymer Films
Micromachines, 2022 Microelectromechanical systems (MEMS) have been increasingly used worldwide in a wide range of applications, including high tech, energy, medicine or environmental applications.
Denisa Ficai +7 more
doaj +1 more source
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures [PDF]
, 2002 This paper presents guidelines for the deep reactive ion etching (DRIE) of silicon MEMS structures, employing SF/sub 6//O/sub 2/-based high-density plasmas at cryogenic temperatures.
Boer, Meint J. de +6 more
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Field tests of a portable MEMS gravimeter [PDF]
, 2017 Gravimeters are used to measure density anomalies under the ground. They are applied in many different fields from volcanology to oil and gas exploration, but present commercial systems are costly and massive.
Bramsiepe, Steven G. +6 more
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Technological Assessment of MEMS Alkali Vapor Cells for Atomic References
Micromachines, 2018 This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail.
Pawel Knapkiewicz
doaj +1 more source
Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers [PDF]
, 2006 A new microfabrication technology for high-aspect-ratio parylene structure has been developed for soft spring applications. Free-standing parylene beams with widths of 10–40 µm and aspect ratios of 10–20 have been successfully fabricated.
Suzuki, Yuji, Tai, Yu-Chong
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Sensors, 2020 Electronic performance and tracking systems (EPTS) and microelectromechanical systems (MEMS) allow the measurement of training load (TL) and collective behavior in team sports so that match performance can be optimized.
Markel Rico-González +4 more
doaj +1 more source
Micro-electro-mechanical systems (MEMS): Technology for the 21st century [PDF]
Hemijska Industrija, 2014 Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators.
Đakov Tatjana A. +2 more
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, 2018 The quality of eye image data become degraded particularly when the image is taken in the non-cooperative acquisition environment such as under visible wavelength illumination.
Ahmad, Asraful Syifaa’ +6 more
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Design and Applications of Integrated Transducers in Commercial CMOS Technology
Frontiers in Mechanical Engineering, 2022 Monolithic integration of Microelectromechanical Systems (MEMS) directly within CMOS technology offers enhanced functionality for integrated circuits (IC) and the potential improvement of system-level performance for MEMS devices in close proximity to ...
Udit Rawat +2 more
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