Results 21 to 30 of about 5,809 (181)
Editorial for the Special Issue on Gas Flows in Microsystems
Micromachines, 2019 The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields [...]
Stéphane Colin, Lucien Baldas
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A Calibration Algorithm for Microelectromechanical Inertial Sensors
Известия высших учебных заведений России: Радиоэлектроника, 2022 Introduction. Systematic errors of microelectromechanical (MEMS) inertial sensors, such as those related to zero drift, scale factor, and nonorthogonality of sensitive axes, are the main sources of errors in strapdown inertial navigation systems (SINS ...
Nguyen Trong Yen +2 more
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Microsystems & Nanoengineering, 2021 I have been developing MEMS (microelectromechanical systems) technology and supporting the industry through collaboration. A facility was built in house on a 20 mm square wafer for use in prototyping MEMS and ICs (integrated circuits).
Masayoshi Esashi
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Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
Micromachines, 2018 Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as ...
Jessica Ortigoza-Diaz +8 more
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Technological Assessment of MEMS Alkali Vapor Cells for Atomic References
Micromachines, 2018 This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail.
Pawel Knapkiewicz
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Alexandria Engineering Journal, 2020 A significant phenomenon associated with devices used in nano/microelectromechanical systems (N/MEMS) is the dynamic pull-in instability. The basic theme of this manuscript is to study the nonlinear oscillation and dynamic pull-in instability in an N ...
Naveed Anjum, Ji-Huan He
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Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition
MicromachinesMicroelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing [...]
Zhi-Xuan Dai +2 more
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Phase Engineering of Nanomaterials (PEN): Evolution, Current Challenges, and Future Opportunities
Advanced Materials, EarlyView.This review summarizes the synthesis, phase transition, advanced characterization spanning ex situ to in situ and operando techniques, and diverse applications of phase engineering of nanomaterials (PEN). It further outlines key challenges and future opportunities, such as phase stability, architecture control, and artificial intelligence (AI)‐driven ...
Ye Chen +7 more
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Micromachines, 2023 The measurement of in-plane motion in microelectromechanical systems (MEMS) is a challenge for existing measurement techniques due to the small size of the moving devices and the low amplitude of motion. This paper studied the possibility of using images
Tarmo Nieminen +3 more
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Advanced Materials Technologies, EarlyView.In this study, we developed a light–driven soft microgripper by 3D–printing a photo–crosslinkable, temperature–responsive hydrogel with embedded silver particles onto an optical fiber tip. The microgripper actuates via photothermal effects at cell culture temperature and can gently grasp spheroids without minimal damage, offering a compact, actuator ...
Shogo Oishi +7 more
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