MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics
Micromachines, 2022 Commonly encountered problems in the manipulation of objects with robotic hands are the contact force control and the setting of approaching motion. Microelectromechanical systems (MEMS) sensors on robots offer several solutions to these problems along ...
Ilker S. Bayer
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Wide tuning-range planar filters using lumped-distributed coupled resonators [PDF]
, 2005 This paper describes a discretely tunable filter topology based on lumped-distributed coupled transmission lines, particularly suitable for microelectromechanical systems switching devices.
Beach, MA +3 more
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MEMS Technology for Optical Switching
Walailak Journal of Science and Technology, 2012 Over the last ten years, microelectromechanical systems (MEMS) devices have received attention in many application areas such microwave, wireless, and optical networks. Especially in optical networks, MEMS technology is employed to provide the advantages
Kornkamol THAKULSUKANANT
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Electrically tunable collective response in a coupled micromechanical array [PDF]
, 2002 We employ optical diffraction to study the mechanical properties of a grating array of suspended doubly clamped beams made of Au. The device allows application of electrostatic coupling between the beams that gives rise to formation of a band of normal ...
Buks, Eyal, Roukes, Michael L.
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IEEE Access, 2020 High-performance microelectromechanical systems (MEMS) are playing a critical role in modern engineering systems. Due to computationally expensive numerical analysis and stringent design specifications nowadays, both the optimization efficiency and ...
Mobayode O. Akinsolu +6 more
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Editorial for the Special Issue on Micromachined Acoustic Transducers for Audio-Frequency Range
MicromachinesMicroelectromechanical systems (MEMS) refer to miniaturized mechanical and electro-mechanical elements that are fabricated through microelectronic processes [...]
Libor Rufer +5 more
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Design, fabrication, and testing of micromachined silicone rubbermembrane valves [PDF]
, 1999 Technologies for fabricating silicone rubber membranes and integrating them with other processes on silicon wafers have been developed. Silicone rubber has been found to have exceptional mechanical properties including low modulus, high elongation, and ...
Grosjean, Charles +2 more
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Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition
MicromachinesMicroelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing [...]
Zhi-Xuan Dai +2 more
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Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications
Proceedings, 2017 MicroElectroMechanical Systems (MEMS) made of heterostructures of crystalline oxide materials with targeted physical properties may be applied as sensors having different integrated functionalities.
Federico Remaggi +4 more
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Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant [PDF]
, 2010 This paper presents an implant-based wireless pressure sensing paradigm for long-range continuous intraocular pressure (IOP) monitoring of glaucoma patients. An implantable parylene-based pressure sensor has been developed, featuring an electrical LC-
Chen, Po-Jui +4 more
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