Results 151 to 160 of about 34,828 (229)

Micromachines. Optical Micromachines.

open access: yesThe Journal of The Institute of Electrical Engineers of Japan, 1997
openaire   +2 more sources

Micromachines. Microactuators and Distributed Micromachines.

open access: yesThe Journal of The Institute of Electrical Engineers of Japan, 1997
openaire   +2 more sources

Micro-Hotplate for Thermocatalytic Gas Sensor Fabricated by Ceramic Laser Micromachining. [PDF]

open access: yesMicromachines (Basel)
Samotaev N   +6 more
europepmc   +1 more source

Micromachining

open access: yesTetsu-to-Hagane, 1992
openaire   +2 more sources

Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]

open access: yesMicrosyst Nanoeng
Yu J   +9 more
europepmc   +1 more source

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