Results 21 to 30 of about 34,809 (218)
Micromachining of buried micro channels in silicon [PDF]
, 2000 A new method for the fabrication of micro structures for fluidic applications, such as channels, cavities, and connector holes in the bulk of silicon wafers, called buried channel technology (BCT), is presented in this paper.
Berenschot, J.W. (Erwin) +7 more
core +3 more sources
Surface micromachined membranes for tunnel transducers [PDF]
, 1997 We have developed low-temperature surface micromachining procedures for the fabrication of suspended SiO2/Si3N4 membranes. This fabrication method was integrated with electron beam lithography, anisotropic ion etching, and electroplating to construct ...
George, Thomas +2 more
core +1 more source
Optofluidic Micromachined Platform for Refractive Index Measurement
Chemosensors, 2022 We present a combination of micromachined optofluidic platforms equipped with a fiber-optic sensing configuration based on a three-path Mach–Zehnder interferometer (MZI) for simultaneous measurement of the refractive index of liquids and the ...
Zoran Djinović +2 more
doaj +1 more source
Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition and single-crystal diamond micro tools [PDF]
, 2010 Insufficient experimental data from various micro tools limit industrial application of the micromilling process. This paper presents an experimental comparative investigation into micromilling of oxygen-free, high-conductivity copper using tungsten ...
Cheng, K, Huo, D
core +1 more source
Investigation of the effects of machining parameters on surface integrity in micromachining
Open Chemistry, 2022 In this study, the effect of cutting conditions on surface integrity was investigated in micromilling of magnesium alloy (AZ91). Microtool diameter, cutting speed, feed rate, and depth of cut parameters are used.
Etyemez Ayhan, Aydin Umut
doaj +1 more source
Crystals, 2022 Functional wetting surfaces have excellent prospects in applications including self-cleaning, anti-fog, anti-icing, corrosion resistance, droplet control, and friction power generation.
Yang Liu +8 more
doaj +1 more source
Multiphysics simulation of piezoresistive pressure microsensor using finite element method [PDF]
FME Transactions, 2021 In this study, the electro-mechanical behavior of a specially designed highsensitive piezoresistor pressure microsensor was simulated using finite element method, through COMSOL multiphysics software.
Pashmforoush Farzad
doaj
Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives [PDF]
, 1995 This paper documents results related to design optimization, fabrication process refinement, and micron-level static/dynamic testing of silicon micromachined microgimbals that have applications in super-compact computer disk drives as well as many other ...
Hsieh, Wen H. +4 more
core +1 more source
Laser Micromachining of Glass, Silicon, and Ceramics
Advances in Materials Science and Engineering, 2015 A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace.
L. Rihakova, H. Chmelickova
doaj +1 more source
Micromachines, 2015 Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples.
Simas Butkus +7 more
doaj +1 more source