Results 101 to 110 of about 273 (145)
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An electrostatically rebalanced micromechanical accelerometer
Guidance, Navigation and Control Conference, 1989This paper discusses the results of testing a micromechanical accelerometer with integral electrodes. It is suitable for use with the CSDL micromechanical gyro, previously described in last years' conference, (Ref. 1) and could be fabricated on the same chip. The accelerometer has a capacitive sensor and electrostatic torquer.
BURTON BOXENHORN, PAUL GREIFF
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The Micromechanical Accelerometer and the Micromechanical Gyroscope
2017The micromechanical inertial sensors in the fabrication of micromechanical technology mainly include the micromechanical accelerometer and the micromechanical gyroscope.
Fuxue Zhang, Wei Zhang, Guosheng Wang
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Optimization of micromechanical accelerometer structures
Measurement Techniques, 2011This article demonstrates the feasibility of optimizing the choice of known measurement circuits using as a criterion the minimum value of a functional of the square of the difference between the ideal conversion function of the circuit being studied and a conversion function that includes the effect of parasitic semiconductor structures.
A. A. Papko +2 more
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Micromechanical accelerometers based on surface acoustic waves
2014 NORCHIP, 2014The fundamentals of the theory of surface acoustic waves (SAW) and the principles of construction of differential SAW-based converters are disclaimed. The concept of constructing a SAW-based microaccelerometer, which allows to provide the stability of the device operation in a wide temperature range, is presented. Calculation of the optimal form of the
Dmitry Lukyanov +4 more
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Calibration of the Wireless Unit of Micromechanical Accelerometers
Applied Mechanics and Materials, 2012The report describes an original method of calibrating an autonomous unit of wireless accelerometers manufactured by Microdevices Laboratory, Ltd [1]. Without the use of precision rotary tables, centrifuges, and an independent basement (against vibrations), it is possible to reduce the error caused by the mismatch (not orthogonal)of sensor’s axes. Zero
Alexey Timoshenkov +3 more
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Design and analysis of micromechanical resonant accelerometer
2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) Proceedings, 2012A novel micro resonant accelerometer was designed for increasing the sensitivity of resonant accelerometer, which includes two double-ended tuning forks, a proof mass, two-leverage system amplifying inertial force, and drive/sense combs. Each tuning fork is electro-statically actuated and sensed at resonance using comb electrodes.
Jing Li +5 more
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Research of the micromechanical three-axis accelerometer
SPIE Proceedings, 2016In the report the linear acceleration sensor design with three axis of sensitivity is researched. Parameterized geometry and finite element model for modal analysis are developed in the ANSYS program. Behavioral description of the study design is developed with language VHDL-AMS to simulate the sensor operation under the influence of linear ...
B. Konoplev +4 more
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Micromechanical accelerometer integrated with MOS detection circuitry
IEEE Transactions on Electron Devices, 1982A cantilever beam accelerometer is described in which the small cantilever sensing element is integrated with and fabricated alongside MOS detection circuitry. The total area of the detector/circuit combination is about 15000 µm2(24 mil2). Fully compatible and conventional materials and processing steps are employed throughout the fabrication schedule.
K.E. Petersen, A. Shartel, N.F. Raley
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Micromechanical accelerometer integrated with MOS detection circuitry
1980 International Electron Devices Meeting, 1980A cantilever beam accelerometer has been demonstrated in which the small cantilever sensing element is integrated with and fabricated alongside MOS detection circuitry. Fully compatible and conventional materials and processing steps are employed throughout the fabrication schedule.
K. Petersen, A. Shartel
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Silicon micromechanical accelerometer using an optical fiber
SPIE Proceedings, 2002In this paper, a new type of silicon micro-mechanical accelerometer using an optical fiber is presented. The mechanical element of the accelerometer is fabricated by an unconventional wet etching process of silicon, resulting in symmetrically suspended seismic masses with a high lateral sensitivity and very low transverse sensitivities.
Tongyu Wang, Shuren Zhang
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