Results 111 to 120 of about 273 (145)
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Application of microlever to micromechanical silicon resonant accelerometers
Optics and Precision Engineering, 2011A micromechanical Silicon Resonant Accelerometer(SRA) prototype fabricated by Deep Dry Silicon on Glass(DDSOG) process was presented.The amplification of single-stage microlever in the SRA to the interial force was researched,then it pointed out that the scale factor of SRA is proportional to the system amplification factor n.The theoretical model of ...
石然 SHI Ran +3 more
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Pendulum Micromechanical Angular Accelerometer with Force Feedback
2007 International Conference on Mechatronics and Automation, 2007This paper bring forward a kind of pendulum micromechanical angular accelerometer with force feedback, which might be proposed by us, first. The sensor adopts a pendulum with mass joined to the anchors by a pair torsion-spring beams as sensing device, differential-capacitor device for detecting the angular acceleration about the X axis, an ...
null Li Jianli +2 more
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Design of the Analog Front-End for the Micromechanical Accelerometer
2020The given work is devoted to the design of the analog front-end of the capacitive MEMS accelerometer. In the following thesis the basic capacitive accelerometer ASIC design approaches are discussed. The main error sources in such systems are analyzed.
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Linearity enhancement of scale factor in an optical interrogated micromechanical accelerometer
Applied Optics, 2016A method to reduce the residual stress of support arms in an optical interrogated micromechanical accelerometer is proposed in order to enhance the linearity of the scale factor of the accelerometer. First, the behavior of residual stress in support arms is analyzed in detail, and the simulation of shape curvature caused by residual stress in aluminum ...
Yu, Zhang +3 more
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Technology tools for a high precision accelerometer in bulk micromechanics
Microsystem Technologies, 1994The high precision accelerometer consists of 5 silicon wafers and packages by silicon fusion bonding. The sensor has a capacitance measuring principle and works in an open loop or closed loop operation mode. The etching process for the realization of thin beams and seismic mass, the silicon fusion bonding and the metallization process are described.
T. Geßner, E. Vetter, M. Wiemer
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Temperature influence mechanism of micromechanical silicon oscillating accelerometer
2011 IEEE Power Engineering and Automation Conference, 2011Bias value and scale factor (SF) are two main performance indexes of silicon oscillating accelerometer(SOA). A deep research on that how temperature influence the performance of SOA by changing the effective stiffness of resonators, is made so as to reduce the temperature sensitivity of it in this paper.
Jin-hu Dong, An-ping Qiu, Ran Shi
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Phase noise analysis of micromechanical silicon resonant accelerometer
Sensors and Actuators A: Physical, 2013Abstract The phase noise in micromechanical silicon resonant accelerometer (SRA) can perturb its frequency output and determines the minimum detectable change in acceleration (sensor resolution). In order to improve the resolution and optimize the sensor performance, the phase noise of SRA is studied in this paper. Theoretical model of phase noise of
Ran Shi +3 more
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Capacitive Accelerometer Made by Silicon Micromechanics
1990A capacitive accelerometer has been fabricated from Si 110 wafers using the silicon micromachining technique. The sensor basically consist out of an elastically suspended plate between two fixed capacitor plates.
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Development of constructive-kinematic model of micromechanical accelerometers
Issues of radio electronics, 2019The article discusses the problem of improving the quality and competitiveness of MEMS based on the structural kinematic model built on new physical principles and laws. The relevancy is conditioned by Decree of the Government of the Russian Federation No.328 dated 15 April 2014 «On Approval of the State Program of the Russian Federation «Development ...
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A micromechanical silicon oscillating accelerometer
1997Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. ; Includes bibliographical references (leaves 90-91). ; by Kevin A. Gibbons. ; M.S.
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