Results 141 to 150 of about 2,210 (181)

Phase noise analysis of micromechanical silicon resonant accelerometer

Sensors and Actuators A: Physical, 2013
Abstract The phase noise in micromechanical silicon resonant accelerometer (SRA) can perturb its frequency output and determines the minimum detectable change in acceleration (sensor resolution). In order to improve the resolution and optimize the sensor performance, the phase noise of SRA is studied in this paper. Theoretical model of phase noise of
Ran Shi, Fang-xiu Jia, An-ping Qiu, Yan Su   +3 more
exaly   +2 more sources

Integrated circuit layout design for a micromechanical accelerometer

2017 24th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS), 2017
Layout design stage of an integrated circuit for a micromechanical accelerometer is considered. A method for automated placement of repeating elements of analog blocks is proposed. The method takes into account area restrictions and placement of a block digital part.
I. V. Lemko, Ya. V. Belyaev, D. V. Kostygov, N. N. Nevirkovets, Yu. A. Andryakov, A. A. Mikhteeva   +5 more
exaly   +2 more sources

Design and simulation of a multifinger micromechanical silicon accelerometer

SPIE Proceedings, 2001
A kind of micromechanical silicon accelerometer with medium low performance designed for either commercial or military markets is described in this paper. Its sensitive element is a multi-finger micromechanical structure and its sensitive direction is parallel to the proof mass, which is fixed to the base through four folded beams. The accelerometer is
Jing-Xin Dong, Jun-Hua Qin
exaly   +2 more sources

Study on Packaging Thermal Stress of Micromechanical Silicon Resonant Accelerometer

Applied Mechanics and Materials, 2013
Packaging thermal stress is harmful to the performance of the micromechanical silicon resonant accelerometer. In order to decrease the packaging thermal stress, correlations of packaging thermal stress with the material properties, curing temperature and geometrical size of adhesive layers of adhesive materials were discussed. A finite element model of
Yang Gao
exaly   +2 more sources

An electrostatically rebalanced micromechanical accelerometer

Guidance, Navigation and Control Conference, 1989
This paper discusses the results of testing a micromechanical accelerometer with integral electrodes. It is suitable for use with the CSDL micromechanical gyro, previously described in last years' conference, (Ref. 1) and could be fabricated on the same chip. The accelerometer has a capacitive sensor and electrostatic torquer.
BURTON BOXENHORN, PAUL GREIFF
openaire   +1 more source

Development of a Sensitive Element of a Micromechanical Accelerometer

Russian Microelectronics, 2022
Micromechanical accelerometers have wide range of applications in industry and robotechnics due to the main advantages such like low power consumption, small dimensions and weight, low cost in serial production. Therefore, micromechanical accelerometers research and development received priority.
E. S. Kochurina, S. A. Anchutin, V. V. Kalugin, N. M. Zaryankin, A. S. Timoshenkov, I. S. Dernov   +5 more
openaire   +1 more source

Optimization of micromechanical accelerometer structures

Measurement Techniques, 2011
This article demonstrates the feasibility of optimizing the choice of known measurement circuits using as a criterion the minimum value of a functional of the square of the difference between the ideal conversion function of the circuit being studied and a conversion function that includes the effect of parasitic semiconductor structures.
A. A. Papko, M. A. Kalinin, V. V. Alekseeva   +2 more
openaire   +1 more source

Micromechanical accelerometer integrated with MOS detection circuitry

IEEE Transactions on Electron Devices, 1982
A cantilever beam accelerometer is described in which the small cantilever sensing element is integrated with and fabricated alongside MOS detection circuitry. The total area of the detector/circuit combination is about 15000 µm2(24 mil2). Fully compatible and conventional materials and processing steps are employed throughout the fabrication schedule.
K.E. Petersen, A. Shartel, N.F. Raley
openaire   +1 more source

Design and analysis of micromechanical resonant accelerometer

2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) Proceedings, 2012
A novel micro resonant accelerometer was designed for increasing the sensitivity of resonant accelerometer, which includes two double-ended tuning forks, a proof mass, two-leverage system amplifying inertial force, and drive/sense combs. Each tuning fork is electro-statically actuated and sensed at resonance using comb electrodes.
Jing Li, Shangchun Fan, Cheng Li, Guo Zhanshe, Gao Shi Qiao, Liu Hai Peng   +5 more
openaire   +1 more source

Pendulum Micromechanical Angular Accelerometer with Force Feedback

2007 International Conference on Mechatronics and Automation, 2007
This paper bring forward a kind of pendulum micromechanical angular accelerometer with force feedback, which might be proposed by us, first. The sensor adopts a pendulum with mass joined to the anchors by a pair torsion-spring beams as sensing device, differential-capacitor device for detecting the angular acceleration about the X axis, an ...
null Li Jianli, Fang Jiancheng, Sheng Wei   +2 more
openaire   +1 more source