Results 161 to 170 of about 2,210 (181)

Capacitive Accelerometer Made by Silicon Micromechanics

1990
A capacitive accelerometer has been fabricated from Si 110 wafers using the silicon micromachining technique. The sensor basically consist out of an elastically suspended plate between two fixed capacitor plates.
openaire   +1 more source

System Damping Ratio Analysis of a Capacitive Micromechanical Accelerometer

2005 6th International Conference on Electronic Packaging Technology, 2006
In this paper, system damping ratio analysis and optimization of a capacitive MEMS accelerometer is performed. To investigate the influence of damping on the system dynamic characteristics the system dynamics equations with or without damping are solved.
null Liu Xiaowei, null Chen Hong, null Chen Weiping   +2 more
openaire   +1 more source

Linearity enhancement of scale factor in an optical interrogated micromechanical accelerometer

Applied Optics, 2016
A method to reduce the residual stress of support arms in an optical interrogated micromechanical accelerometer is proposed in order to enhance the linearity of the scale factor of the accelerometer. First, the behavior of residual stress in support arms is analyzed in detail, and the simulation of shape curvature caused by residual stress in aluminum ...
Yu, Zhang, Lishuang, Feng, Xiao, Wang, Yang, Wang   +3 more
openaire   +2 more sources

A micromechanical structure eliminating lateral effect of silicon accelerometer

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2002
A novel two-mass micromechanical structure for a silicon accelerometer is described. In this structure, each mass is attached to the rim by two beams and a fifth beam bridges the two masses at the central area of the structure. An acceleration normal to the device plane can bring about significant stress in the central beam area while any lateral ...
null Bao Minhang, null Chen Jian, null Shen Shaoqun   +2 more
openaire   +1 more source

Development of constructive-kinematic model of micromechanical accelerometers

Issues of radio electronics, 2019
The article discusses the problem of improving the quality and competitiveness of MEMS based on the structural kinematic model built on new physical principles and laws. The relevancy is conditioned by Decree of the Government of the Russian Federation No.328 dated 15 April 2014 «On Approval of the State Program of the Russian Federation «Development ...
openaire   +1 more source

Technology tools for a high precision accelerometer in bulk micromechanics

Microsystem Technologies, 1994
The high precision accelerometer consists of 5 silicon wafers and packages by silicon fusion bonding. The sensor has a capacitance measuring principle and works in an open loop or closed loop operation mode. The etching process for the realization of thin beams and seismic mass, the silicon fusion bonding and the metallization process are described.
T. Geßner, E. Vetter, M. Wiemer
openaire   +1 more source

Design of the Analog Front-End for the Micromechanical Accelerometer

2020
The given work is devoted to the design of the analog front-end of the capacitive MEMS accelerometer. In the following thesis the basic capacitive accelerometer ASIC design approaches are discussed. The main error sources in such systems are analyzed.
openaire   +1 more source

Development and research of a micromechanical accelerometer sensor element

International Conference on Micro- and Nano-Electronics 2021, 2022
Viktor Kalugin, Elena Kochurina, Leonid Boev, Stepan Anchutin, Aleksey Timoshenkov   +4 more
openaire   +1 more source

Mechanical Design of Micromechanical Silicon Oscillating Accelerometer

2022
openaire   +1 more source

Micromechanical accelerometer for automotive applications

Smart Materials Bulletin, 2001
openaire   +1 more source