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Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer
2017Libin Huang
exaly
A Low-Cost Micromechanical Accelerometer With Integrated Solid-State Sensor
Sensors and Actuators A: Physical, 2000exaly
Micromechanical accelerometer for automotive applications
2000GALVIN GREGORY J +2 more
openaire +1 more source

