Results 171 to 180 of about 2,210 (181)

Deep Reactive Ion Etching of Device Layer during Manufacture Micromechanical Accelerometer

2022
exaly  

Micromechanical three axis capacitive accelerometer

2012
FRANGI, ATTILIO ALBERTO, De Masi B., Simoni B.   +2 more
openaire   +1 more source

A High-Sensitivity Micromechanical Silicon Resonant Accelerometer without Mechanical Coupling

Applied Mechanics and Materials, 2015
exaly  

Design and Simulation of a Micromechanical Silicon Resonant Accelerometer with Low Temperature Sensitivity

2018
Yang Gao, Hongsheng Li, Libin Huang
exaly  

Calculation and Modeling of the Main Parameters of a Differential Capacitive Micromechanical Accelerometer

2020
exaly  

Investigation of Surface Temperature for Sensitive Element of Micromechanical Accelerometer During Plasma Etching Using Finite Element Method

2023
exaly  

Analysis of the Suspension Elements for the Sensitive Element of a Micromechanical Accelerometer

2021
exaly  

Accelerometer based on non-linear micromechanical transformer with frequency output

2014
exaly  

A low-cost micromechanical accelerometer with integrated solid-state sensor

Sensors and Actuators A: Physical, 2000
exaly  

Design analysis of a high-Q micromechanical capacitive accelerometer system

IEICE Electronics Express, 2017
exaly