Results 151 to 160 of about 87,849 (169)

Investigation of Surface Temperature for Sensitive Element of Micromechanical Accelerometer During Plasma Etching Using Finite Element Method

2023
Olga Yulmetova
exaly  

Deep Reactive Ion Etching of Device Layer During Manufacture Micromechanical Accelerometer

2022
exaly  

A MICROMECHANICAL ACCELEROMETER

1996
MOORE DAVID FRANK, BURGESS STUART CLYDE, KLAUBERT HEATHER, CHIANG HIANG-SWEE, SHIBAIKE NARITO, KIRIYAMA TAKASHI   +5 more
openaire   +2 more sources

CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER

2014
LIUKKU MATTI, RYTKÖNEN VILLE-PEKKA
openaire   +3 more sources

A Closed-Loop ΣΔ Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/ \surdHz Input Noise Density

IEEE Journal of Solid-State Circuits, 2015
Liang Yin, Honglin Xu
exaly  

Micromechanical accelerometer

1999
MOORE DAVID FRANK, BURGESS STUART CLYDE, KLAUBERT HEATHER, CHIANG HIANG-SWEE, SHIBAIKE NARITO, KIRIYAMI TAKASHI   +5 more
openaire   +1 more source

Calculation and Modeling of the Main Parameters of a Differential Capacitive Micromechanical Accelerometer

2020
Ye Ko Ko Aung
exaly  

Study on Packaging Thermal Stress of Micromechanical Silicon Resonant Accelerometer

Applied Mechanics and Materials, 2013
Yang Gao, Li bin Huang
exaly  

Micromechanical angular accelerometer with auxiliary linear accelerometer

1995
GREIFF PAUL, BOXENHORN BURTON, WEINBERG MARC S   +2 more
openaire   +2 more sources

Micromechanical Gyros & Accelerometers for Digital Navigation & Control Systems

IEEE Aerospace and Electronic Systems Magazine, 2009
exaly