Results 151 to 160 of about 2,210 (181)
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Micromechanical accelerometers based on surface acoustic waves
2014 NORCHIP, 2014The fundamentals of the theory of surface acoustic waves (SAW) and the principles of construction of differential SAW-based converters are disclaimed. The concept of constructing a SAW-based microaccelerometer, which allows to provide the stability of the device operation in a wide temperature range, is presented. Calculation of the optimal form of the
D. Lukyanov +4 more
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Micromechanical accelerometer integrated with MOS detection circuitry
1980 International Electron Devices Meeting, 1980A cantilever beam accelerometer has been demonstrated in which the small cantilever sensing element is integrated with and fabricated alongside MOS detection circuitry. Fully compatible and conventional materials and processing steps are employed throughout the fabrication schedule.
K. Petersen, A. Shartel
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The Micromechanical Accelerometer and the Micromechanical Gyroscope
2017The micromechanical inertial sensors in the fabrication of micromechanical technology mainly include the micromechanical accelerometer and the micromechanical gyroscope.
Fuxue Zhang, Wei Zhang, Guosheng Wang
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Research of the micromechanical three-axis accelerometer
SPIE Proceedings, 2016In the report the linear acceleration sensor design with three axis of sensitivity is researched. Parameterized geometry and finite element model for modal analysis are developed in the ANSYS program. Behavioral description of the study design is developed with language VHDL-AMS to simulate the sensor operation under the influence of linear ...
B. Konoplev +4 more
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Silicon micromechanical accelerometer using an optical fiber
SPIE Proceedings, 2002In this paper, a new type of silicon micro-mechanical accelerometer using an optical fiber is presented. The mechanical element of the accelerometer is fabricated by an unconventional wet etching process of silicon, resulting in symmetrically suspended seismic masses with a high lateral sensitivity and very low transverse sensitivities.
Tongyu Wang, Shuren Zhang
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Temperature Self-Compensation of Micromechanical Silicon Resonant Accelerometer
Applied Mechanics and Materials, 2013Temperature is one of the most important factors affecting the accuracy of micromechanical silicon resonant accelerometer (SRA). In order to reduce the temperature sensitivity and improve the sensor performance, a new method of temperature self-compensation for SRA is presented in this paper. Utilizing the differential structure of SRA, the temperature
Ran Shi +3 more
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Temperature influence mechanism of micromechanical silicon oscillating accelerometer
2011 IEEE Power Engineering and Automation Conference, 2011Bias value and scale factor (SF) are two main performance indexes of silicon oscillating accelerometer(SOA). A deep research on that how temperature influence the performance of SOA by changing the effective stiffness of resonators, is made so as to reduce the temperature sensitivity of it in this paper.
Jin-hu Dong, An-ping Qiu, Ran Shi
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Calibration of the Wireless Unit of Micromechanical Accelerometers
Applied Mechanics and Materials, 2012The report describes an original method of calibrating an autonomous unit of wireless accelerometers manufactured by Microdevices Laboratory, Ltd [1]. Without the use of precision rotary tables, centrifuges, and an independent basement (against vibrations), it is possible to reduce the error caused by the mismatch (not orthogonal)of sensor’s axes. Zero
Alexey Timoshenkov +3 more
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Performance Analysis on Capacitance Micromechanical Comb-Finger Accelerometer
Key Engineering Materials, 2008Variable-capacitance micromechanical accelerometer is widely used because of its high sensitivity and low power. Therefore, the further study on its performance has much theoretical and applicable significance. This paper takes the closed-loop bias stationary comb-finger variable-capacitance accelerometer as an example, introduces its operation ...
Xue Mei Hu, Q.L. Han
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Application of microlever to micromechanical silicon resonant accelerometers
Optics and Precision Engineering, 2011A micromechanical Silicon Resonant Accelerometer(SRA) prototype fabricated by Deep Dry Silicon on Glass(DDSOG) process was presented.The amplification of single-stage microlever in the SRA to the interial force was researched,then it pointed out that the scale factor of SRA is proportional to the system amplification factor n.The theoretical model of ...
石然 SHI Ran +3 more
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