Results 121 to 130 of about 87,849 (169)

Development of a Micromechanical Accelerometer

2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus), 2021
The article describes the developed design of the sensing element of a micromechanical accelerometer, provides the results of modeling: modal analysis, analysis under the static effect of acceleration, calculated changes in the main parameters of the accelerometer when the temperature changes.
Mikhail D Kochergin
exaly   +2 more sources

Design of a Micromechanical Accelerometer

2018 25th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS), 2018
Stages of design of a sensing element with an electrode structure, and an integrated circuit of a micromechanical accelerometer, starting from a system model and a circuit level, and ending with the development of topology, are considered. The results of testing the accelerometer main components, such as sensing element and integrated circuit, and the ...
Ya.V. Belyaev, A. A. Belogurov, A. N. Bocharov, D. V. Kostygov, I. V. Lemko, A. A. Mihteeva, A. V. Yakimova, N. N. Nevirkovets, N. M. Chernetskaya   +8 more
exaly   +2 more sources

Integrated Circuit Layout Design for a Micromechanical Accelerometer

2017 24th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS), 2017
Layout design stage of an integrated circuit for a micromechanical accelerometer is considered. A method for automated placement of repeating elements of analog blocks is proposed. The method takes into account area restrictions and placement of a block digital part.
Ya V Belyaev
exaly   +2 more sources

Design and Simulation of a Multifinger Micromechanical Silicon Accelerometer

SPIE Proceedings, 2001
A kind of micromechanical silicon accelerometer with medium low performance designed for either commercial or military markets is described in this paper. Its sensitive element is a multi-finger micromechanical structure and its sensitive direction is parallel to the proof mass, which is fixed to the base through four folded beams. The accelerometer is
Jing-Xin Dong, Jun-Hua Qin
exaly   +2 more sources

Pendulum Micromechanical Angular Accelerometer With Force Feedback

2007 International Conference on Mechatronics and Automation, 2007
This paper bring forward a kind of pendulum micromechanical angular accelerometer with force feedback, which might be proposed by us, first. The sensor adopts a pendulum with mass joined to the anchors by a pair torsion-spring beams as sensing device, differential-capacitor device for detecting the angular acceleration about the X axis, an ...
Fang Jiancheng
exaly   +2 more sources

Development of a Sensitive Element of a Micromechanical Accelerometer

Russian Microelectronics, 2022
Micromechanical accelerometers have wide range of applications in industry and robotechnics due to the main advantages such like low power consumption, small dimensions and weight, low cost in serial production. Therefore, micromechanical accelerometers research and development received priority.
E. S. Kochurina, S. A. Anchutin, V. V. Kalugin, N. M. Zaryankin, A. S. Timoshenkov, I. S. Dernov   +5 more
openaire   +1 more source

An electrostatically rebalanced micromechanical accelerometer

Guidance, Navigation and Control Conference, 1989
This paper discusses the results of testing a micromechanical accelerometer with integral electrodes. It is suitable for use with the CSDL micromechanical gyro, previously described in last years' conference, (Ref. 1) and could be fabricated on the same chip. The accelerometer has a capacitive sensor and electrostatic torquer.
BURTON BOXENHORN, PAUL GREIFF
openaire   +1 more source

The Micromechanical Accelerometer and the Micromechanical Gyroscope

2017
The micromechanical inertial sensors in the fabrication of micromechanical technology mainly include the micromechanical accelerometer and the micromechanical gyroscope.
Fuxue Zhang, Wei Zhang, Guosheng Wang
openaire   +1 more source

Optimization of micromechanical accelerometer structures

Measurement Techniques, 2011
This article demonstrates the feasibility of optimizing the choice of known measurement circuits using as a criterion the minimum value of a functional of the square of the difference between the ideal conversion function of the circuit being studied and a conversion function that includes the effect of parasitic semiconductor structures.
A. A. Papko, M. A. Kalinin, V. V. Alekseeva   +2 more
openaire   +1 more source

Micromechanical accelerometers based on surface acoustic waves

2014 NORCHIP, 2014
The fundamentals of the theory of surface acoustic waves (SAW) and the principles of construction of differential SAW-based converters are disclaimed. The concept of constructing a SAW-based microaccelerometer, which allows to provide the stability of the device operation in a wide temperature range, is presented. Calculation of the optimal form of the
Dmitry Lukyanov, Sergey Yu. Shevchenko, Alexander S. Kukaev, E. Filippova, D. Safronov   +4 more
openaire   +1 more source