Results 151 to 160 of about 6,247 (204)
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SPIE Proceedings, 1999
We give a quick overview of MOEMS technologies under development at LETI. We mainly focus on recent developments in relation with the 'Europractice Competence Center Number 3' dedicated to MOEMS whose LETI is the coordinator. MOEMS are optical devices offering simultaneously optical and mechanical functions, and achieved in a collective manner by means
Patrick L. Mottier +4 more
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We give a quick overview of MOEMS technologies under development at LETI. We mainly focus on recent developments in relation with the 'Europractice Competence Center Number 3' dedicated to MOEMS whose LETI is the coordinator. MOEMS are optical devices offering simultaneously optical and mechanical functions, and achieved in a collective manner by means
Patrick L. Mottier +4 more
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1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369), 2002
This paper presents an overview of research and development programs at AFRL/VS in micro-opto-electro-mechanical systems (MOEMS) for adaptive optics. Adaptive optic systems typically consist of a wavefront phase sensor, focusing optics, a spatial light modulator (SLM) for correcting phase errors, imaging sensors, and the control and processing ...
J.H. Comtois +3 more
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This paper presents an overview of research and development programs at AFRL/VS in micro-opto-electro-mechanical systems (MOEMS) for adaptive optics. Adaptive optic systems typically consist of a wavefront phase sensor, focusing optics, a spatial light modulator (SLM) for correcting phase errors, imaging sensors, and the control and processing ...
J.H. Comtois +3 more
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Proceedings of IEEE Sensors, 2003
Bonded hydrophobic wafer pairs (PEW wafers) are applied as alternative substrates for optical devices (pin-diodes and complex MOEMS). Important parameters of diodes are analysed at temperatures up to 160/spl deg/C (dark current, photocurrent, CV-curves, rise time).
M. Reiche, E. Hiller, D. Stolze
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Bonded hydrophobic wafer pairs (PEW wafers) are applied as alternative substrates for optical devices (pin-diodes and complex MOEMS). Important parameters of diodes are analysed at temperatures up to 160/spl deg/C (dark current, photocurrent, CV-curves, rise time).
M. Reiche, E. Hiller, D. Stolze
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Vernier MOEMS alignment mechanisms
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005., 2006Positional precision in MOEMS alignment is increased beyond the value set by pattern transfer using a Vernier mechanism based on multiple rack-and-tooth latches.
R.R.A. Syms, H. Zou, J. Stagg
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SPIE Proceedings, 2006
In 2001, the sudden downturn of Telecom business changed the optical MEMS landscape. Some MEMS companies who were focusing only on telecom applications shut down (OMM as the most famous example) and many companies stopped their optical MEMS developments (Atmel, Memscap).
Eric Mounier +2 more
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In 2001, the sudden downturn of Telecom business changed the optical MEMS landscape. Some MEMS companies who were focusing only on telecom applications shut down (OMM as the most famous example) and many companies stopped their optical MEMS developments (Atmel, Memscap).
Eric Mounier +2 more
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Microsystem Technologies, 2005
In this paper, packaging techniques of fiber optical MEMS devices are investigated. A packaging scheme is proposed, which includes the architecture to construct the component package and the major packaging flow to implement it. Passive fiber alignment with the accuracy comparable with active alignment is presented by the combination of rectangular ...
Z. F. Wang, W. Cao, Z. Lu
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In this paper, packaging techniques of fiber optical MEMS devices are investigated. A packaging scheme is proposed, which includes the architecture to construct the component package and the major packaging flow to implement it. Passive fiber alignment with the accuracy comparable with active alignment is presented by the combination of rectangular ...
Z. F. Wang, W. Cao, Z. Lu
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A Dual-Axis MOEMS Accelerometer
IEEE Sensors Journal, 2021This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) suspended by four L-shaped springs. Two Fabry-Perot (FP) cavities are formed between the cross-sections of the PM and the ends of two cleaved optical fibers in perpendicular directions (
Majid Taghavi +5 more
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SPIE Proceedings, 2011
Shaping light with microtechnology components has been possible for many years. The Texas Instruments digital micromirror device (DMD) and all types of adaptive optics systems are very sophisticated tools, well established and widely used. Here we present, however, two very dedicated systems, where one is an extremely simple MEMS-based tunable diffuser,
W. Noell +13 more
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Shaping light with microtechnology components has been possible for many years. The Texas Instruments digital micromirror device (DMD) and all types of adaptive optics systems are very sophisticated tools, well established and widely used. Here we present, however, two very dedicated systems, where one is an extremely simple MEMS-based tunable diffuser,
W. Noell +13 more
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2008 Ph.D. Research in Microelectronics and Electronics, 2008
A novel thermo-mechanical infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties.
M. Fatih Toy +4 more
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A novel thermo-mechanical infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties.
M. Fatih Toy +4 more
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5th IEEE Conference on Nanotechnology, 2005., 2005
This paper examines active crystals for high-performance nanotechnology-enhanced microscale opto-electro-mechanical systems (MOEMS). With the ultimate objective to deflect the beam in three-dimensional space, we study opto-electromagnetically-active crystals. With novel technology and control paradigm, super-high-performance MOEMS can be designed.
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This paper examines active crystals for high-performance nanotechnology-enhanced microscale opto-electro-mechanical systems (MOEMS). With the ultimate objective to deflect the beam in three-dimensional space, we study opto-electromagnetically-active crystals. With novel technology and control paradigm, super-high-performance MOEMS can be designed.
openaire +1 more source