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MOEMS for prospective space applications
SPIE Proceedings, 2011We are involved with ESA and CNES since several years, in the analysis of space applications using MOEMS components. A first concept using a Programmable Micro Diffracting Device (PMDG) has been proposed for an astronomical spectrometer with a small field of view.
Thierry Viard +4 more
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Digitally tunable MOEMS diffraction gratings
Journal of Micro/Nanolithography, MEMS, and MOEMS, 2014The angles of diffraction of a grating are a function of the incident wavelength and the period of the grating. The ability to vary the period of a grating is of interest in a variety of applications, as this in effect provides tunability of the diffraction angles. Most tunable gratings vary the period in an analog fashion.
Gowri Suresh Vesalapu +2 more
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Photonic Crystal-Based MOEMS Devices
IEEE Journal of Selected Topics in Quantum Electronics, 2007In this paper, a new class of microoptoelectromechanical system (MOEMS) devices combining photonic crystals (PCs) formed in in-plane waveguiding membranes (in-plane 1-D or 2-D large contrast modulation of the optical index) and a multilayer stack (1-D "vertical" modulation of the optical index) according to the so-called 2.5-D micronanophotonics ...
Salim Boutami +8 more
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SPIE Proceedings, 2005
ABSTRACT InP-based micro-opto-electro-mechanical systems (MOEMS) for the long wavelength range (1.3 and 1.55 µ m) have been extensively investigated during the last years. The fabrication of ultra-thin and hence ultra-flexible structures that can be actuated electrostatically was limited by residual strain within the structural layers.
Martin Strassner +2 more
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ABSTRACT InP-based micro-opto-electro-mechanical systems (MOEMS) for the long wavelength range (1.3 and 1.55 µ m) have been extensively investigated during the last years. The fabrication of ultra-thin and hence ultra-flexible structures that can be actuated electrostatically was limited by residual strain within the structural layers.
Martin Strassner +2 more
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MEMS, MOEMS and Optoelectronics
Micro-Electro-Mechanical Systems (MEMS), 2001Abstract Traditional MEMS (Micro-Electro-Mechanical Systems) devices have been with us for decades. A micromechanical motion sensor connected to the airbag electronics in your vehicle is always ready to send the instant message that can save your life.
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Cubic-inch MOEMS spectral imager
MOEMS and Miniaturized Systems XVIII, 2019Recently developed tunable MEMS Fabry- Perot interferometers based on Ag thin-film mirrors[1] have enabled building highly miniaturized spectral imagers covering almost the complete VNIR wavelength range. The level of miniaturization required by modern smartphone industry has created extremely compact, high performance electronics and camera ...
Holmlund, Christer +12 more
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III-V semiconductor-based MOEMS
SPIE Proceedings, 1999The state of the art of III-V semiconductor based Micro- Opto-Mechanical Systems (MOEMS) is presented with a special emphasis on InP and related materials. It is shown that the MOEMS technology can enhance considerably the capabilities of optical micro-cavities, which are considered as a major component for optical signal processing and light ...
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Precise phase control of resonant MOEMS mirrors by comb-drive current feedback
Mechatronics, 2020David Brunner +2 more
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