Results 191 to 200 of about 6,247 (204)
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Position encoding and phase control of resonant MOEMS mirrors
Sensors and Actuators A: Physical, 2010exaly
Optical MOEMS 2002 author index
IEEE/LEOS International Conference on Optical MEMs OMEMS-02, 2002openaire +1 more source
Improving yield, accuracy and complexity in surface tension self-assembled MOEMS
Sensors and Actuators A: Physical, 2001exaly
A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range
IEEE Transactions on Industrial Electronicsqu ziqiang, Hao Ouyang, Wen Xiong
exaly
MEMS and MOEMS Packaging Challenges
Journal of Materials Processing & Manufacturing Science, 2000openaire +1 more source